Piezoelectric deformable mirror driven by unimorph actuator arrays on multi-spatial layers.
Opt Express
; 31(8): 13374-13383, 2023 Apr 10.
Article
em En
| MEDLINE
| ID: mdl-37157476
ABSTRACT
In order to reduce the cost of the piezo actuator array deformable mirror (DM), a piezoelectric DM driven by unimorph actuator arrays on multi-spatial layers is proposed. The actuator density can be multiplied by increasing the spatial layers of the actuator arrays. A low-cost DM prototype with 19 unimorph actuators located on three spatial layers is developed. The unimorph actuator can generate a wavefront deformation up to 11â
µm at an operating voltage of 50â
V. The DM can reconstruct typical low-order Zernike polynomial shapes accurately. The mirror can be flattened to 0.058â
µm in RMS. Furthermore, a focal spot close to Airy spot is obtained in the far field after the aberrations of the adaptive optics testing system being corrected.
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MEDLINE
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En
Ano de publicação:
2023
Tipo de documento:
Article