Femtosecond-laser-based full-field three-dimensional imaging with phase compensation.
Opt Express
; 31(13): 21899-21910, 2023 Jun 19.
Article
em En
| MEDLINE
| ID: mdl-37381276
ABSTRACT
Coherence scanning interferometer (CSI) enables 3D imaging with nanoscale precision. However, the efficiency of such a system is limited because of the restriction imposed by the acquisition system. Herein, we propose a phase compensation method that reduces the interferometric fringe period of femtosecond-laser-based CSI, resulting in larger sampling intervals. We realize this method by synchronizing the heterodyne frequency with the repetition frequency of the femtosecond laser. The experimental results show that our method can keep the root-mean-square axial error down to 2â
nm at a high scanning speed of 6.44 µm per frame, which enables fast nanoscale profilometry over a wide area.
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MEDLINE
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Ano de publicação:
2023
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Article