Your browser doesn't support javascript.
loading
Anti-Reflective Coatings Produced via Atomic Layer Deposition for Hybrid Polymer 3D Micro-Optics.
Astrauskyte, Darija; Galvanauskas, Karolis; Gailevicius, Darius; Drazdys, Mantas; Malinauskas, Mangirdas; Grineviciute, Lina.
Afiliação
  • Astrauskyte D; Center for Physical Sciences and Technology, Savanoriu av. 231, LT-02300 Vilnius, Lithuania.
  • Galvanauskas K; Laser Research Center, Physics Faculty, Vilnius University, Sauletekio av. 10, LT-10223 Vilnius, Lithuania.
  • Gailevicius D; Laser Research Center, Physics Faculty, Vilnius University, Sauletekio av. 10, LT-10223 Vilnius, Lithuania.
  • Drazdys M; Center for Physical Sciences and Technology, Savanoriu av. 231, LT-02300 Vilnius, Lithuania.
  • Malinauskas M; Laser Research Center, Physics Faculty, Vilnius University, Sauletekio av. 10, LT-10223 Vilnius, Lithuania.
  • Grineviciute L; Center for Physical Sciences and Technology, Savanoriu av. 231, LT-02300 Vilnius, Lithuania.
Nanomaterials (Basel) ; 13(16)2023 Aug 08.
Article em En | MEDLINE | ID: mdl-37630866
The increasing demand for optics quality requires the lowest optical power loss, which can occur from unwanted reflections. Laser direct writing (LDW) allows for the fabrication of complex structures, which is particularly advantageous in micro-optic applications. This research demonstrates the possibility of forming an anti-reflective coating on hybrid polymer micro-lenses fabricated by employing LDW without changing their geometry. Such coating deposited via atomic layer deposition (ALD) decreased the reflection from 3.3% to 0.1% at a wavelength of 633 nm for one surface of hybrid organic-inorganic SZ2080™ material. This research validates the compatibility of ALD with LDW 3D multiphoton lithography synergistically, expanding its applications on optical grade sub-100 µm scale micro-optics.
Palavras-chave

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2023 Tipo de documento: Article

Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2023 Tipo de documento: Article