A Study on the Harmonic Distortion of Seismic-Grade Sigma-Delta MEMS Accelerometers Using a Multiple Degree-of-Freedom Model.

Wang, Xuefeng; Zhang, Penghao; Ding, Shijin.

Afiliação

Wang X; State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 200433, China.
Zhang P; State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 200433, China.
Ding S; State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 200433, China.

Sensors (Basel) ; 23(19)2023 Oct 02.

Article em En | MEDLINE | ID: mdl-37837052