Multiphysics Modeling and Analysis of Sc-Doped AlN Thin Film Based Piezoelectric Micromachined Ultrasonic Transducer by Finite Element Method.

Liu, Xiaonan; Zhang, Qiaozhen; Chen, Mingzhu; Liu, Yaqi; Zhu, Jianqiu; Yang, Jiye; Wang, Feifei; Tang, Yanxue; Zhao, Xiangyong.

Afiliação

Liu X; Shanghai Normal University, Shanghai 200234, China.
Zhang Q; Key Laboratory of Optoelectronic Material and Device, Department of Physics, Shanghai Normal University, Shanghai 200234, China.
Chen M; Shanghai Normal University, Shanghai 200234, China.
Liu Y; Shanghai Normal University, Shanghai 200234, China.
Zhu J; Shanghai Normal University, Shanghai 200234, China.
Yang J; Key Laboratory of Optoelectronic Material and Device, Department of Physics, Shanghai Normal University, Shanghai 200234, China.
Wang F; Shanghai Normal University, Shanghai 200234, China.
Tang Y; Shanghai Normal University, Shanghai 200234, China.
Zhao X; Shanghai Normal University, Shanghai 200234, China.