Analysis and Design of Fiber Microprobe Displacement Sensors Including Collimated Type and Convergent Type for Ultra-Precision Displacement Measurement.

ABSTRACT

In this paper, a fiber optic microprobe displacement sensor is proposed considering characteristics of micro-Michelson interference structure and its components. The principal error of micro Fabry-Perot interferometric structure is avoided, and high-precision interferometric displacement measurement is realized. The collimated microprobe and convergent microprobe are analyzed, simulated, and designed for the purposes of measuring long-distance displacement and small spot rough surface, respectively. The core parameters of the probes' internal components are mapped to coupling efficiency and contrast of the sensor measurements, which provides a basis for the probes' design. Finally, simulation and experimental testing of the two probes show that the collimated probe's working distance and converging probe's tolerance angle can reach 40 cm and ±0.5°, respectively. The designed probes are installed in the fiber laser interferometer, and a displacement resolution of 0.4 nm is achieved.