Combining thermal scanning probe lithography and dry etching for grayscale nanopattern amplification.

Erbas, Berke; Conde-Rubio, Ana; Liu, Xia; Pernollet, Joffrey; Wang, Zhenyu; Bertsch, Arnaud; Penedo, Marcos; Fantner, Georg; Banerjee, Mitali; Kis, Andras; Boero, Giovanni; Brugger, Juergen

Erbas, Berke; Conde-Rubio, Ana; Liu, Xia; Pernollet, Joffrey; Wang, Zhenyu; Bertsch, Arnaud; Penedo, Marcos; Fantner, Georg; Banerjee, Mitali; Kis, Andras; Boero, Giovanni; Brugger, Juergen.

Afiliação

Erbas B; Microsystems Laboratory, École Polytechnique Fédérale de Lausanne (EPFL), Lausanne, 1015 Switzerland.
Conde-Rubio A; Microsystems Laboratory, École Polytechnique Fédérale de Lausanne (EPFL), Lausanne, 1015 Switzerland.
Liu X; Present Address: Institute of Materials Science of Barcelona ICMAB-CSIC, Campus UAB, Bellaterra, 08193 Spain.
Pernollet J; Microsystems Laboratory, École Polytechnique Fédérale de Lausanne (EPFL), Lausanne, 1015 Switzerland.
Wang Z; Present Address: School of Integrated Circuits and Electronics, MIIT Key Laboratory for Low-Dimensional Quantum Structure and Devices, Beijing Institute of Technology, Beijing, 100081 China.
Bertsch A; Center of MicroNanoTechnology (CMi), EPFL, Lausanne, 1015 Switzerland.
Penedo M; Laboratory of Nanoscale Electronics and Structures, École Polytechnique Fédérale de Lausanne (EPFL), Lausanne, 1015 Switzerland.
Fantner G; Microsystems Laboratory, École Polytechnique Fédérale de Lausanne (EPFL), Lausanne, 1015 Switzerland.
Banerjee M; Laboratory for Bio- and Nano- Instrumentation, École Polytechnique Fédérale de Lausanne (EPFL), Lausanne, 1015 Switzerland.
Kis A; Laboratory for Bio- and Nano- Instrumentation, École Polytechnique Fédérale de Lausanne (EPFL), Lausanne, 1015 Switzerland.
Boero G; Laboratory of Quantum Physics, Topology and Correlations, École Polytechnique Fédérale de Lausanne (EPFL), Lausanne, 1015 Switzerland.
Brugger J; Laboratory of Nanoscale Electronics and Structures, École Polytechnique Fédérale de Lausanne (EPFL), Lausanne, 1015 Switzerland.