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Carbon Micro/Nano Machining toward Miniaturized Device: Structural Engineering, Large-Scale Fabrication, and Performance Optimization.
Ma, Zeyu; Wang, Wenwu; Xiong, Yibo; Long, Yihao; Shao, Qi; Wu, Leixin; Wang, Jiangwang; Tian, Peng; Khan, Arif Ullah; Yang, Wenhao; Dong, Yixiao; Yin, Hongbo; Tang, Hui; Dai, Jun; Tahir, Muhammad; Liu, Xiaoyu; He, Liang.
Afiliação
  • Ma Z; School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China.
  • Wang W; School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China.
  • Xiong Y; School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China.
  • Long Y; School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China.
  • Shao Q; School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China.
  • Wu L; School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China.
  • Wang J; School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China.
  • Tian P; School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China.
  • Khan AU; School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China.
  • Yang W; School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China.
  • Dong Y; Pritzker School of Molecular Engineering, University of Chicago, 5640 South Ellis Avenue, Chicago, IL, 60637, USA.
  • Yin H; Department of Ophthalmology, West China Hospital, Sichuan University, Chengdu, 610041, P. R. China.
  • Tang H; School of Materials and Energy, University of Electronic Science and Technology of China, Chengdu, 611731, P. R. China.
  • Dai J; School of Mechatronical Engineering, Beijing Institute of Technology, Beijing, 100081, P. R. China.
  • Tahir M; School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China.
  • Liu X; School of Mechatronical Engineering, Beijing Institute of Technology, Beijing, 100081, P. R. China.
  • He L; School of Mechanical Engineering, State Key Laboratory of Intelligent Construction and Healthy Operation and Maintenance of Deep Underground Engineering, Sichuan University, Chengdu, 610065, P. R. China.
Small ; : e2400179, 2024 Jul 19.
Article em En | MEDLINE | ID: mdl-39031523
ABSTRACT
With the rapid development of micro/nano machining, there is an elevated demand for high-performance microdevices with high reliability and low cost. Due to their outstanding electrochemical, optical, electrical, and mechanical performance, carbon materials are extensively utilized in constructing microdevices for energy storage, sensing, and optoelectronics. Carbon micro/nano machining is fundamental in carbon-based intelligent microelectronics, multifunctional integrated microsystems, high-reliability portable/wearable consumer electronics, and portable medical diagnostic systems. Despite numerous reviews on carbon materials, a comprehensive overview is lacking that systematically encapsulates the development of high-performance microdevices based on carbon micro/nano structures, from structural design to manufacturing strategies and specific applications. This review focuses on the latest progress in carbon micro/nano machining toward miniaturized device, including structural engineering, large-scale fabrication, and performance optimization. Especially, the review targets an in-depth evaluation of carbon-based micro energy storage devices, microsensors, microactuators, miniaturized photoresponsive and electromagnetic interference shielding devices. Moreover, it highlights the challenges and opportunities in the large-scale manufacturing of carbon-based microdevices, aiming to spark further exciting research directions and application prospectives.
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Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2024 Tipo de documento: Article
Texto completo
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XML
PubMed Links
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Texto completo: 1 Base de dados: MEDLINE Idioma: En Ano de publicação: 2024 Tipo de documento: Article