Responsivity and NEP Improvement of Terahertz Microbolometer by High-Impedance Antenna.

The antenna-coupled microbolometer with suspended titanium heater and thermistor was attractive as a terahertz (THz) detector due to its structural simplicity and low noise levels. In this study, we attempted to improve the responsivity and noise-equivalent power (NEP) of the THz detector by using high-resistance heater stacked on the meander thermistor. A wide range of heater resistances were prepared by changing the heater width and thickness. It was revealed that the electrical responsivity and NEP could be improved by increasing the heater's resistance. To make the best use of this improvement, a high-impedance folded dipole antenna was introduced, and the optical performance at 1 THz was found to be better than that of the conventional halfwave dipole antenna combined with a low-resistance heater. Both the electrical and optical measurement results indicated that the increase in heater resistance could reduce the thermal conductance in the detector, thus improved the responsivity and NEP even if the thermistor resistance was kept the same.

Multifunctional and Sensitivity Enhancement of Hybrid Acoustoplasmonic Sensors Fabricated on 36XY-LiTaO3 with Gold Nanoparticles for the Detection of Permittivity, Conductivity, and the Refractive Index.

Integration of high-sensitivity sensors with multiple sensing performance for the environmental detection of permittivity (εr), conductivity (σ), and the refractive index (n) is required to support Societies 5.0. However, there are still many sensors with low sensitivity that stand alone. A shear-horizontal surface acoustic wave (SH-SAW) sensor is usually used because of its high-sensitivity performance in detecting electrical properties. Moreover, localized surface plasmon resonance (LSPR) sensors show remarkable optical side capability. Here, we have successfully combined these advantages with an additional benefit of sensitivity enhancement. We propose a hybrid acoustoplasmonic sensor generated by integrating SH-SAW and LSPR devices to simultaneously detect εr, σ, and n. The SH-SAW sensor was fabricated on a 36XY-LiTaO3 substrate using a developed interdigital transducer. Then, the LSPR sensor was implemented by the deposition of gold nanoparticles (AuNPs) on the propagation surfaces of the SH-SAW sensor. Fascinatingly, the AuNPs not only generate the LSPR effect but also enhance the SH-SAW sensor sensitivity. Comprehensive investigations were performed with atomic force microscopy imaging, CST software used for plasmonic E-field simulation, and hybrid sensing evaluation. Moreover, the SH-SAW sensitivity enhancement achieved using AuNPs was verified by frequency-domain and time-domain measurements. Thus, the SH-SAW sensor with AuNPs has a wide εr detection range (25-85), sensing capabilities for ultrasmall σ (0.00528-0.02504 S/m), and high sensitivity for n detection (45.5-201.9 nm/RIU). The cross-sectional effects were also evaluated. The effect of the LSPR device on the SH-SAW device was examined by turning the light OFF or ON (hereafter OFF/ON). The impact of the SH-SAW device on the LSPR device was investigated by turning the sine signal OFF/ON. We found that the SH-SAW sensor was not impacted by light. Interestingly, the presence of the SH-SAW sensor affects the positions of the AuNPs, which consistently generates a small blueshift in the LSPR effect. However, insignificant variation was noted in independent performances. In general, the SH-SAW sensor with AuNPs shows multifunctional independent characteristics and high-sensitivity performance, making it suitable for a chemical environment, with the possibility of integration with a wireless network.