RESUMEN
Metasurfaces play a crucial role in trapping electromagnetic waves with specific wavelengths, serving as a significant platform for enhancing light-matter interactions. In all kinds of dynamic modulation metasurfaces, electro-optic modulation metasurfaces have attracted much attention due to its advantages of fast, stable and high efficiency. In order to respond to the extremely weak refractive index change of the electro-optical effect of the materials, the metasurfaces are required to support optical signals with high Q values. The quasi-bound state in the continuum (Q-BIC) is often used to enhance the light-field modulation capability of metasurfaces and to improve the modulation sensitivity of electro-optic modulators due to its ability to generate high Q-factor resonances. However, the design of an electro-optic modulation metasurface that facilitates the application of voltage and achieves modulation efficiency of nearly 100% is still in urgent need of development. In this study, single-crystal BTO metasurfaces are modeled using finite-difference time-domain method, and the structural symmetry is broken to introduce a Q-BIC resonance to generate a high Q-factor optical signal of 2.45 × 104 for high-depth electro-optic modulation. By simulating an applied electric field of 143â V/mm on the metasurface, a slight refractive index change of BTO of 8 × 10-4 was produced, leading to an electro-optical intensity modulation depth of 100%. Furthermore, the nanostructure of the metasurface was carefully designed to facilitate nano-fabrication and voltage application, and it is ideal for the development of low-power, CMOS-compatible, and miniaturized electro-optic modulation devices. Although the results of this study are based on simulations, they provide a crucial theoretical basis and guidance for the realization of efficient and realistic design of dynamic metasurfaces.