Imaging Nanomechanical Vibrations and Manipulating Parametric Mode Coupling via Scanning Microwave Microscopy.

In this study, we present a novel platform based on scanning microwave microscopy for manipulating and detecting tiny vibrations of nanoelectromechanical resonators using a single metallic tip. The tip is placed on the top of a grounded silicon nitride membrane, acting as a movable top gate of the coupled resonator. We demonstrate its ability to map mechanical modes and investigate mechanical damping effects in a capacitive coupling scheme, based on its spatial resolution. We also manipulate the energy transfer coherently between the mode of the scanning tip and the underlying silicon nitride membrane, via parametric coupling. Typical features of optomechanics, such as anti-damping and electromechanically induced transparency, have been observed. Since the microwave optomechanical technology is fully compatible with quantum electronics and very low temperature conditions, it should provide a powerful tool for studying phonon tunnelling between two spatially separated vibrating elements, which could potentially be applied to quantum sensing.

Generation of Soliton Frequency Combs in NEMS.

In this study, we present an innovative approach leveraging combination internal resonances within a NEMS platform to generate mechanical soliton frequency combs (FCs) spanning a broad spectrum. In the time domain, the FCs take the form of a periodic train of narrow pulses, a highly coveted phenomenon within the realm of nonlinear wave-matter interactions. Our method relies on an intricate interaction among multiple vibration modes of a bracket-nanocantilever enabled by the strong nonlinearity of the electrostatic field. Through numerical simulation and experimental validation, we demonstrate that by amplifying the motions of the NEMS with the external electrostatic forcing tuned to excite the superharmonic resonance of order-n of the fundamental mode and exploiting combination internal resonances, we can generate multiple stable localized mechanical wave packets with different lobe sizes embodying soliton states I and II. This represents a significant breakthrough with profound implications for quantum computing and metrology.

Tunable Stochastic State Switching in 2D MoS2 Nanomechanical Resonators with Nonlinear Mode Coupling and Internal Resonance.

Coupled nanomechanical resonators have unveiled fascinating physical phenomena, including phonon-cavity coupling, coupled energy decay pathway, avoided crossing, and internal resonance. Despite these discoveries, the mechanisms and control techniques of nonlinear mode coupling phenomena with internal resonances require further exploration. Here, we report on the observation of stochastic switching between the two resonance states with coupled 1:1 internal resonance, for resonant two-dimensional (2D) molybdenum disulfide (MoS2) nanoelectromechanical systems (NEMS), which is directly driven to the critical coupling regime without parametric pumping. We further demonstrate that the probability of state switching is linearly tunable from ∼0% to ∼100% by varying the driving voltage. Furthermore, we gradually increase the white noise amplitude and show that the probability of obtaining the higher-energy state decreases, and the stochastic switching phenomenon eventually disappears. The results provide insights into the dynamics of coupled NEMS resonators and open up new possibilities for sensing and stochastic computing.

Materials for electronically controllable microactuators.

Abstract: Electronically controllable actuators have shrunk to remarkably small dimensions, thanks to recent advances in materials science. Currently, multiple classes of actuators can operate at the micron scale, be patterned using lithographic techniques, and be driven by complementary metal oxide semiconductor (CMOS)-compatible voltages, enabling new technologies, including digitally controlled micro-cilia, cell-sized origami structures, and autonomous microrobots controlled by onboard semiconductor electronics. This field is poised to grow, as many of these actuator technologies are the firsts of their kind and much of the underlying design space remains unexplored. To help map the current state of the art and set goals for the future, here, we overview existing work and examine how key figures of merit for actuation at the microscale, including force output, response time, power consumption, efficiency, and durability are fundamentally intertwined. In doing so, we find performance limits and tradeoffs for different classes of microactuators based on the coupling mechanism between electrical energy, chemical energy, and mechanical work. These limits both point to future goals for actuator development and signal promising applications for these actuators in sophisticated electronically integrated microrobotic systems.

Atmospheric-Pressure Mass Spectrometry by Single-Mode Nanoelectromechanical Systems.

Weighing particles above the megadalton mass range has been a persistent challenge in commercial mass spectrometry. Recently, nanoelectromechanical systems-based mass spectrometry (NEMS-MS) has shown remarkable performance in this mass range, especially with the advance of performing mass spectrometry under entirely atmospheric conditions. This advance reduces the overall complexity and cost while increasing the limit of detection. However, this technique required the tracking of two mechanical modes and the accurate knowledge of mode shapes that may deviate from their ideal values, especially due to air damping. Here, we used a NEMS architecture with a central platform, which enables the calculation of mass by single-mode measurements. Experiments were conducted using polystyrene and gold nanoparticles to demonstrate the successful acquisition of mass spectra using a single mode with an improved areal capture efficiency. This advance represents a step forward in NEMS-MS, bringing it closer to becoming a practical application for the mass sensing of nanoparticles.

Probing Linear to Nonlinear Damping in 2D Semiconductor Nanoelectromechanical Resonators toward a Unified Quality Factor Model.

In resonant nanoelectromechanical systems (NEMS), the quality (Q) factor is essential for sensing, communication, and computing applications. While a large vibrational amplitude is useful for increasing the signal-to-noise ratio, the damping in this regime is more complex because both linear and nonlinear damping are important, and an accurate model for Q has not been fully explored. Here, we demonstrate that by combining the time-domain ringdown and frequency-domain resonance measurements, we extract the accurate Q for two-dimensional (2D) MoS2 and MoTe2 NEMS resonators at different vibration amplitudes. In particular, in the transition region between linear and nonlinear damping, Q can be precisely extracted by fitting to the ringdown characteristics. By varying AC driving, we tune the Q by ΔQ/Q = 269% and extract the nonlinear damping coefficient. We develop the dissipation model that well captures the linear to nonlinear damping, providing important insights for accurately modeling and optimizing Q in 2D NEMS resonators.

Transduction of Single Nanomechanical Pillar Resonators by Scattering of Surface Acoustic Waves.

One of the challenges of nanoelectromechanical systems (NEMS) is the effective transduction of the tiny resonators. Vertical structures, such as nanomechanical pillar resonators, which are exploited in optomechanics, acoustic metamaterials, and nanomechanical sensing, are particularly challenging to transduce. Existing electromechanical transduction methods are ill-suited as they put constraints on the pillars' material and do not enable a transduction of freestanding pillars. Here, we present an electromechanical transduction method for single nanomechanical pillar resonators based on surface acoustic waves (SAWs). We demonstrate the transduction of freestanding nanomechanical platinum-carbon pillars in the first-order bending and compression mode. Since the principle of the transduction method is based on resonant scattering of a SAW by a nanomechanical resonator, our transduction method is independent of the pillar's material and not limited to pillar-shaped geometries. It represents a general method to transduce vertical mechanical resonators with nanoscale lateral dimensions.

Kirigami Engineering of Suspended Graphene Transducers.

The low mass density and high mechanical strength of graphene make it an attractive candidate for suspended-membrane energy transducers. Typically, the membrane size dictates the operational frequency and bandwidth. However, in many cases it would be desirable to both lower the resonance frequency and increase the bandwidth, while maintaining overall membrane size. We employ focused ion beam milling or laser ablation to create kirigami-like modification of suspended pure-graphene membranes ranging in size from microns to millimeters. Kirigami engineering successfully reduces the resonant frequency, increases the displacement amplitude, and broadens the effective bandwidth of the transducer. Our results present a promising route to miniaturized wide-band energy transducers with enhanced operational parameter range and efficiency.

Self-Sealing Complex Oxide Resonators.

Although 2D materials hold great potential for next-generation pressure sensors, recent studies revealed that gases permeate along the membrane-surface interface, necessitating additional sealing procedures. In this work, we demonstrate the use of free-standing complex oxides as self-sealing membranes that allow the reference cavity beneath to be sealed by a simple anneal. To test the hermeticity, we study the gas permeation time constants in nanomechanical resonators made from SrRuO3 and SrTiO3 membranes suspended over SiO2/Si cavities which show an improvement up to 4 orders of magnitude in the permeation time constant after annealing the devices. Similar devices fabricated on Si3N4/Si do not show such improvements, suggesting that the adhesion increase over SiO2 is mediated by oxygen bonds that are formed at the SiO2/complex oxide interface during the self-sealing anneal. Picosecond ultrasonics measurements confirm the improvement in the adhesion by 70% after annealing.

Raman Spectroscopic Probe for Nonlinear MoS2 Nanoelectromechanical Resonators.

Resonant nanoelectromechanical systems (NEMS) enabled by two-dimensional (2D) semiconductors have been actively explored and engineered for making ultrascaled transducers toward applications in ultralow-power signal processing, communication, and sensing. Although the transduction of miniscule resonant motions has been achieved by low-noise optical or electronic techniques, direct probing of strain in vibrating 2D semiconductor membranes and the interplay between the spectroscopic and mechanical properties are still largely unexplored. Here, we experimentally demonstrate dynamical phonon softening in atomically thin molybdenum disulfide (MoS2) NEMS resonators by directly coupling Raman spectroscopy with optical interferometry resonance motion detection. In single-layer, bilayer, and trilayer (1L to 3L) MoS2 circular membrane NEMS resonators, we show that high-amplitude nonlinear resonances can enhance the Raman signal amplitude, as well as introduce Raman modes softening up to 0.8 cm-1. These results shall pave the way for engineering the coupling and control between collective mechanical vibrations and Raman modes of the constituent crystals in 2D transducers.

DC Signature of Snap-through Bistability in Carbon Nanotube Mechanical Resonators.

Bistable arched beams exhibiting Euler-Bernoulli snap-through buckling are widely investigated as promising candidates for various potential applications, such as memory devices, energy harvesters, sensors, and actuators. Recently, we reported the realization of a buckled suspended carbon nanotube (CNT) based bistable resonator, which exhibits a unique three-dimensional snap-through transition and an extremely large change in frequency as a result. In this article, we address a unique characteristic of these devices in which a significant change in the DC conductance is also observed at the mechanical snap-through transition. Through the analysis of this phenomenon, we arrive at several important conclusions: we find that the common approach to determining CNT vibrational resonance amplitude is inaccurate; we find evidence that latching phenomena should be easily realizable, relevant for RF switches and nonvolatile memory devices. Finally, we present evidence for possible inner shell sliding, which is relevant for understanding interlayer coupling and moiré pattern research.

Nanomechanical Spectroscopy of 2D Materials.

We introduce a nanomechanical platform for fast and sensitive measurements of the spectrally resolved optical dielectric function of 2D materials. At the heart of our approach is a suspended 2D material integrated into a high Q silicon nitride nanomechanical resonator illuminated by a wavelength-tunable laser source. From the heating-related frequency shift of the resonator as well as its optical reflection measured as a function of photon energy, we obtain the real and imaginary parts of the dielectric function. Our measurements are unaffected by substrate-related screening and do not require any assumptions on the underling optical constants. This fast (τrise ∼ 135 ns), sensitive (noise-equivalent power = 90⁣pW√Hz), and broadband (1.2-3.1 eV, extendable to UV-THz) method provides an attractive alternative to spectroscopic or ellipsometric characterization techniques.

Self-Sensing WS2 Nanotube Torsional Resonators.

We demonstrate self-sensing tungsten disulfide nanotube (WS2 NT) torsional resonators. These resonators exhibit all-electrical self-sensing operation with electrostatic excitation and piezoresistive motion detection. We show that the torsional motion of the WS2 NT resonators results in a change of the nanotube electrical resistance, with the most significant change around their mechanical resonance, where the amplitude of torsional vibrations is maximal. Atomic force microscopy analysis revealed the torsional and bending stiffness of the WS2 NTs, which we used for modeling the behavior of the WS2 NT devices. In addition, the solution of the electrostatic boundary value problem shows how the spatial potential and electrostatic field lines around the device impact its capacitance. The results uncover the coupling between the electrical and mechanical behaviors of WS2 and emphasize their potential to operate as key components in functional devices, such as nanosensors and radio frequency devices.

Symmetry-Breaking-Induced Frequency Combs in Graphene Resonators.

Nonlinearities are inherent to the dynamics of two-dimensional materials. Phenomena-like intermodal coupling already arise at amplitudes of only a few nanometers, and a range of unexplored effects still awaits to be harnessed. Here, we demonstrate a route for generating mechanical frequency combs in graphene resonators undergoing symmetry-breaking forces. We use electrostatic force to break the membrane's out-of-plane symmetry and tune its resonance frequency toward a one-to-two internal resonance, thus achieving strong coupling between two of its mechanical modes. When increasing the drive level, we observe splitting of the fundamental resonance peak, followed by the emergence of a frequency comb regime. We attribute the observed physics to a nonsymmetric restoring potential and show that the frequency comb regime is mediated by Neimark bifurcation of the periodic solution. These results demonstrate that mechanical frequency combs and chaotic dynamics in 2D material resonators can emerge near internal resonances due to symmetry-breaking.

New Protic Ionic Liquids as Potential Additives to Lubricate Si-Based MEMS/NEMS.

The motivation for this work was to develop new protic ionic liquids (PILs) as additives for the lubrication of micro and nanoelectromechanical systems (MEMS and NEMS). Ten PILs based on the combination of methylimidazolium ([MIMH]), 4-picolinium ([4-picH]), pyridinium ([PyrH]), 1,8-diazabicyclo[5.4.0]-undec-7-ene-8-ium ([DBUH]) and tetramethylguanidinium ([TMGH]) cations with hydrogen sulfate([HSO4]) and mesylate ([MeSO3]) anions were tested as additives in polyethylene glycol (PEG200) to lubricate steel/silicon and silicon/silicon contacts. The best additive was [4-picH][HSO4], which adsorbed strongly on the Si surface, leading to a protective film that reduced wear by up to 15 times compared to PEG200.

A Resonant Graphene NEMS Vibrometer.

Measuring vibrations is essential to ensuring building structural safety and machine stability. Predictive maintenance is a central internet of things (IoT) application within the new industrial revolution, where sustainability and performance increase over time are going to be paramount. To reduce the footprint and cost of vibration sensors while improving their performance, new sensor concepts are needed. Here, double-layer graphene membranes are utilized with a suspended silicon proof demonstrating their operation as resonant vibration sensors that show outstanding performance for a given footprint and proof mass. The unveiled sensing effect is based on resonant transduction and has important implications for experimental studies involving thin nano and micro mechanical resonators that are excited by an external shaker.

A label-free biomarkers detection platform relied on a bilayer long-wave infrared metamaterials BioNEMS sensor.

A novel approach based on optical Biological-Nano-Electro-Mechanical-Systems (BioNEMS) sensor is presented in this paper to provide highly sensitive and precise detection of biomolecules. The proposed BioNEMS sensor is relied on a bi-layer metamaterials structure, tuned by its wavelength. The presented biosensor consists of a BioNEMS membrane coated by Complementary Split Ring Resonators and an array of Split Ring Resonators cells on the substrate. While the immobilized bioreceptors adsorb the biomarkers (i.e. mRNA or protein), it causes a bending of the suspended membrane. This is due to the differential surface stress which is induced on the Nano-Electro-Mechanical-Systems structure. As a consequence, the coupling strength of two complementary metamaterial layers and thus the electromagnetic response of the biosensor are changed. Furthermore, the proposed device is designed and analyzed by numerical and analytical approaches in order to obtain its functional characteristics as follows: detection sensitivity of 21 967 nm/RIU, figure of merit of 327.8 RIU-1", mechanical sensitivity of 2.6µm/Nm-1" and resonant frequency of 4.92 kHz. According to the obtained results, the functional characteristics of the proposed label-free biosensor show its high potential for highly sensitive and accurate molecule detections, disease diagnosis as well as drug delivery tests for Lab-On-Chip systems.

Food availability and affordability in a Mediterranean urban context: associations by store type and area-level socio-economic status.

OBJECTIVE: Although food environments have been highlighted as potentially effective targets to improve population diets, evidence on Mediterranean food environments is lacking. We examined differences in food availability and affordability in Madrid (Spain) by store type and area-level socio-economic status (SES). DESIGN: Cross-sectional study. Trained researchers conducted food store audits using the validated Nutrition Environment Measures Survey in Stores for Mediterranean contexts (NEMS-S-MED) tool to measure the availability and price of twelve food groups (specific foods = 35). We computed NEMS-S-MED scores and summarised price data with a Relative Price Index (RPI, comparing prices across stores) and an Affordability Index (normalising prices by area-level income). We compared the availability and affordability of 'healthier-less healthy' food pairs, scores between food store types (supermarkets, specialised, convenience stores and others) and area-level SES using ANOVA and multi-level regression models. SETTING: City of Madrid. 2016 and 2019 to cover a representative sample. PARTICIPANTS: Food stores within a socio-economically diverse sample of sixty-three census tracts (n 151). RESULTS: Supermarkets had higher food availability (37·5/49 NEMS-S-MED points), compared to convenience stores (13·5/49) and specialised stores (8/49). Supermarkets offered lower prices (RPI: 0·83) than specialised stores (RPI: 0·97) and convenience stores (RPI: 2·06). Both 'healthy' and 'less healthy' items were more available in supermarkets. We found no differences in food availability or price by area-level SES, but affordability was higher in higher-income areas. CONCLUSIONS: Supermarkets offered higher food availability and affordability for healthy and less healthy food items. Promoting healthy food availability through supermarkets and specialised stores and/or limiting access to convenience stores are promising policy options to achieve a healthier food environment.

Built-In Packaging for Single Terminal Devices.

An alternative packaging method, termed built-in packaging, is proposed for single terminal devices, and demonstrated with an actuator application. Built-in packaging removes the requirements of wire bonding, chip carrier, PCB, probe station, interconnection elements, and even wires to drive single terminal devices. Reducing these needs simplifies operation and eliminates possible noise sources. A micro resonator device is fabricated and built-in packaged for demonstration with electrostatic actuation and optical measurement. Identical actuation performances are achieved with the most conventional packaging method, wire bonding. The proposed method offers a compact and cheap packaging for industrial and academic applications.

Design, Fabrication, and Characterisation of a Label-Free Nanosensor for Bioapplications.

In this paper, we present a hybrid semiconductor structure for biosensing applications that features the co-integration of nanoelectromechanical systems with the well-known metal oxide semiconductor technology. The proposed structure features an MOSFET as a readout element, and a doubly clamped beam that is isolated from the substrate by a thin air gap, as well as by a tunnel oxide layer. The beam structure is functionalised by a thin layer of biotargets, and the main aim is to detect a particular set of biomolecules, such as enzymes, bacteria, viruses, and DNA/RNA chains, among others. In here, a three-dimensional finite element analysis is performed in order to study the behaviour of the functionalised, doubly clamped beam. Preliminary results for the fabrication and characterisation processes show good agreement between the simulated and measured characteristics.