A Study of Optimizing Lamb Wave Acoustic Mass Sensors' Performance through Adjustment of the Transduction Electrode Metallization Ratio.

This paper presents the design and simulation of a mass sensitive Lamb wave microsensor with CMOS technology provided by SilTerra. In this work, the effects of the metalization ratio variation on the transmission gain, total harmonic distortion (THD), and two different resonant modes (around 66 MHz and 86 MHz) are shown. It has been found that the metalization ratio can be adjusted in order to obtain a compromise between transmission gain and sensitivity, depending on the design criteria. By adding a Si3N4 layer on top of the device, a five-fold improvement in transmission gain is reached. It was also shown that the transmission of the input differential IDT configuration is 20% more efficient than a single terminal. With this combination, the mass sensitivity is about 114 [cm2/gr].

A System in Package Based on a Piezoelectric Micromachined Ultrasonic Transducer Matrix for Ranging Applications.

This paper proposes a system in package (SiP) for ultrasonic ranging composed of a 4 × 8 matrix of piezoelectric micromachined ultrasonic transducers (PMUT) and an interface integrated circuit (IC). The PMUT matrix is fabricated using the PiezoMUMPS process and the IC is implemented in the AMS 0.35 µm technology. Simulation results for the PMUT are compared to the measurement results, and an equivalent circuit has been derived to allow a better approximation of the load of the PMUT on the IC. The control circuit is composed of a high-voltage pulser to drive the PMUT for transmission and of a transimpedance amplifier to amplify the received echo. The working frequency of the system is 1.5 MHz.

Microfluidic Mixing: A Physics-Oriented Review.

This comprehensive review paper focuses on the intricate physics of microfluidics and their application in micromixing techniques. Various methods for enhancing mixing in microchannels are explored, with a keen emphasis on the underlying fluid dynamics principles. Geometrical micromixers employ complex channel designs to induce fluid-fluid interface distortions, yielding efficient mixing while retaining manufacturing simplicity. These methods synergize effectively with external techniques, showcasing promising potential. Electrohydrodynamics harnesses electrokinetic phenomena like electroosmosis, electrophoresis, and electrothermal effects. These methods offer dynamic control over mixing parameters via applied voltage, frequency, and electrode positioning, although power consumption and heating can be drawbacks. Acoustofluidics leverages acoustic waves to drive microstreaming, offering localized yet far-reaching effects. Magnetohydrodynamics, though limited in applicability to certain fluids, showcases potential by utilizing magnetic fields to propel mixing. Selecting an approach hinges on trade-offs among complexity, efficiency, and compatibility with fluid properties. Understanding the physics of fluid behavior and rationalizing these techniques aids in tailoring the most suitable micromixing solution. In a rapidly advancing field, this paper provides a consolidated understanding of these techniques, facilitating the informed choice of approach for specific microfluidic mixing needs.

Design and Implementation of Low-Voltage Tunable Capacitive Micro-Machined Transducers (CMUT) for Portable Applications.

Capacitive micromachined ultrasonic transducers (CMUT) are MEMS-based transducers with advantages over conventional ultrasonic transducers, such as their small size, the ease of integration with semiconductor electronics, and batch fabrication. In this study, the effect of different membrane topologies on the displacement, resonant frequency, and output pressure of the CMUT membrane is investigated in the transmission mode in an air environment. A novel structural-support feature, the rocker stem, is introduced, where the membrane is weakly held to the substrate in order to minimize mechanical constraints. Four different CMUT topologies are designed and assessed to analyze the impacts of topological variations. A new CMUT array configuration is also designed to provide an approach for maximizing CMUT density. This study aims to contribute to efficient CMUT design and the determination of optimum structural parameters for portable applications in air.