Modification of microstructure on PZT films for ultrahigh frequency transducer.

Porous Lead zirconate titanate (PZT) films may have promising applications in high frequency ultrasonic transducers for their capability to modify electrical properties for better electrical and acoustic matching. In this work, porous PZT films in range of several micrometers were fabricated using a chemical solution deposition (CSD) method modified with polyvinylpyrrolidone (PVP) as a pore-foaming agent. The crystalline phase, microstructure and electrical properties of the porous films were investigated as a function of PVP contents, molecular weights and annealing temperatures. It was found that the electrical properties were closely associated with the porosity.