Subwavelength diffraction gratings with macroscopic moiré patterns generated via laser interference lithography.

We propose a simple and flexible fabrication approach based on the moiré effect of photoresist gratings for rapid synthesis of apodized structures with continuously varying depth. Minor modifications in a standard laser interference lithography setup allow creating macroscopic, visible by naked eye moiré patterns that modulate the depth of subwavelength diffraction gratings. The spatial frequency of this modulation is easily controlled in a wide range, allowing to create a quasicrystal in extreme cases. Experimental results are confirmed by a theory with clear graphical solutions and numerical modeling. The method is universal and does not depend on a specific choice of photoresist and/or substrate materials, making it a promising choice for structured light applications, optical security elements or as a basic structuring method of complex optical devices.

Efficient reversible phase mask for TiO2 submicron gratings directly printed on cylindrical surfaces.

In this article we present a radial phase mask specially designed and manufactured for direct micro-structuration under UV photolithography of a cylindrical surface covered by a photoresist TiO2 film. The period of the phase mask is sub-micron (between 480 nm and 720 nm) and allows direct printing on several types of cylindrical components. With this dedicated reversible phase mask we have demonstrated the feasibility of a TiO2 grating with a period of 960 nm, printed on a SiO2 cylinder or inside a SiO2 tube of 8 mm diameter.

Large Area Fabrication of Periodic TiO2 Nanopillars Using Microsphere Photolithography on a Photopatternable Sol-Gel Film.

The authors demonstrate a unique low cost process to print 2D, submicron size, and high refractive index nanopillars using a direct colloidal-photolithography process. A well collimated i-line source emitting at 365 nm wavelength illuminates a mono layer of silica microspheres of 1 µm diameter deposited on a photosensitive TiO2-based sol-gel layer. No etching process is needed since this layer is directly UV photo patternable like a negative photoresist. Furthermore, this thin layer offers interesting optical properties (high refractive index and optical transparency) and good mechanical and chemical stability and thus can be directly used as a functional microstructure (for PV or sensor applications, for example). The paper describes the modeling of the electric field distribution below the spheres during the illumination process, the photochemistry of the TiO2 sol-gel layer process, and preliminary results of TiO2 nanopillars of around 200 nm in diameter fabricated on a three-inch substrate.

Low-loss plasmon-triggered switching between reflected free-space diffraction orders.

Surface plasmon coupling of a TM polarized free space incident beam by means of the + 1st or the -2nd order of a smooth corrugation grating at a metal surface causes the cancellation of the diffracted -1st order free space beam and a maximum of the 0th order Fresnel reflection whereas the converse occurs midway between these two conditions. This implies that angular tilting of the element or wavelength scanning provokes the switching between the -1st and 0th reflected orders. This plasmon-mediated effect on propagating free-space beams exhibits remarkably low absorption losses.

In situ monitoring of thin alumina passive film growth by surface plasmon resonance (SPR) during an electrochemical process.

This article presents a sensing technique to characterize the growth of an alumina passive film on an aluminum micro structured layer in situ. The technique uses surface plasmon resonance (SPR) on aluminum coated gratings with spectroscopic measurements during electrochemical polarization in 0.02M Na2SO4. The structure of the sensor was first simulated and then fabricated by photolithography. The grating was then replicated by nanoimprint (NIL) in Sol-Gel before pure aluminum layer was deposited by RF magnetron sputtering to produce the samples used in this study. Coupled plasmonic and electrochemical measurements confirmed the feasibility of in situ characterization (thickness) of alumina passive film on aluminum-based gratings in neutral aqueous media. Combining both measurements with an appropriated SPR spectrum fitting lead to alumina thickness monitoring within a few nanometers' accuracy. The objectives and challenges of this study are to better characterize the alumina growth during electrochemical process combining in situ electrochemical process and SPR spectra in order to determine thin passive layer characteristics.

Resonant-grating reflection extended to wide-band, large-aperture beams by waveguide-mode coalescence.

The resonant reflection of a free-space beam from a slab waveguide grating is rendered high bandwidth and angularly robust by using a bimodal high index waveguide. A deep double-sided corrugation gives rise to the coalescence of the resonant reflection peaks resulting in a top-hat reflection spectrum. A low-cost waveguide technology based on solar cell amorphous silicon is demonstrated in the near infrared in a polarizer application.

Subwavelength cylindrical grating by holistic phase-mask coordinate transform.

A periodic grating with an integer number of periods is fabricated at the resist-coated wall of a cylinder by exposing a circularly symmetrical planar high index phase mask to a cylindrical wave. This extends the spatial coherence features easily achievable in a planar 2D space to the 3D space of cylindrical waves and elements.

Spatially and polarization resolved plasmon mediated transmission through continuous metal films.

The experimental demonstration and characterization is made of the plasmon-mediated resonant transmission through an embedded undulated continuous thin metal film under normal incidence. 1D undulations are shown to enable a spatially resolved polarisation filtering whereas 2D undulations lead to spatially resolved, polarization independent transmission. Whereas the needed submicron microstructure lends itself in principle to CD-like low-cost mass replication by means of injection moulding and embossing, the present paper demonstrates the expected transmission effects on experimental models based on metal-coated photoresist gratings. The spectral and angular dependence in the neighbourhood of resonance are investigated and the question of the excess losses exhibited by surface plasmons is discussed.

Monolithic double-grating phase mask for large-period highly coherent grating printing.

A monolithic double-grating phase mask comprising three short-pitch grating sections of spatial frequencies k(1) and k(2) collocated at one side of a substrate produces a large-period interferogram without higher harmonics to print in a photoresist film a latent grating of small spatial frequency equal to twice k(2)-k(1). When incorporated in a write-on-the-fly scheme, the elements permit the fabrication of unlimitedly long gratings.