Side-Supported Radial-Mode Thin-Film Piezoelectric-on-Silicon Disk Resonators.

In this paper, anisotropy of single-crystalline silicon (SCS) is exploited to enable side-supported radial-mode thin-film piezoelectric-on-substrate (TPoS) disk resonators. In contrast to the case for isotropic material, it is demonstrated that the displacement of the disk periphery is not uniform for the radial-mode resonance in SCS disks. Specifically, for high-order harmonics, nodal points are formed on the edges, creating an opportunity for placing suspension tethers and enabling side-supported silicon disk resonators at the very high-frequency band with negligible anchor loss. In order to thoroughly study the effect of material properties and the tether location, anchor loss is simulated using a 3-D perfectly matched layer in COMSOL. Through modeling, it is shown that eighth-harmonic side-supported SCS disk resonators could potentially have orders of magnitude lower anchor loss in comparison to their nanocrystalline diamond (NCD) disk resonator counterparts given the tethers are aligned to the [100] crystalline plane of silicon. It is then experimentally demonstrated that in TPoS disk, resonators fabricated on an 8- [Formula: see text] silicon-on-insulator (SOI) wafer, unloaded quality factor improves from ~450 for the second-harmonic mode at 43 MHz to ~11500 for the eighth-harmonic mode at 196 MHz if tethers are aligned to [100] plane. The same trend is not observed for NCD disk resonators and SCS disk resonators with tethers aligned to [110] plane. Finally, the temperature coefficient of frequency is simulated and measured for the radial-mode disk resonators fabricated on the 8- [Formula: see text]-thick degenerately n-type doped SCS, and the TFC data are utilized to guarantee proper identification of the harmonic radial-mode resonance peaks among others.

Quasistatic Cavity Resonance for Ubiquitous Wireless Power Transfer.

Wireless power delivery has the potential to seamlessly power our electrical devices as easily as data is transmitted through the air. However, existing solutions are limited to near contact distances and do not provide the geometric freedom to enable automatic and un-aided charging. We introduce quasistatic cavity resonance (QSCR), which can enable purpose-built structures, such as cabinets, rooms, and warehouses, to generate quasistatic magnetic fields that safely deliver kilowatts of power to mobile receivers contained nearly anywhere within. A theoretical model of a quasistatic cavity resonator is derived, and field distributions along with power transfer efficiency are validated against measured results. An experimental demonstration shows that a 54 m3 QSCR room can deliver power to small coil receivers in nearly any position with 40% to 95% efficiency. Finally, a detailed safety analysis shows that up to 1900 watts can be transmitted to a coil receiver enabling safe and ubiquitous wireless power.