Design of a Hybrid Refractive/Diffractive Lens System for Broadband UV.

Traditional broadband UV optical designs often have complex structural problems and cannot meet the current requirements of light and miniaturization. In this study, we first design the substrate material of double-layer diffractive optical elements (DOEs) in the 0.23-0.8 µm band, optimize the diffraction efficiency and analyze the effect of the angle of incidence on the diffraction efficiency of double-layer DOEs. Second, we design a refractive lens system and a refractive/diffractive hybrid lens system with double-layer DOEs designed for a wide UV wavelength range of 0.23-0.8 µm, a half field of view of 15 mm, an objective aperture of 0.1 and a magnification of 1. The refractive/diffractive hybrid lens system designed with seven lenses produces a higher image quality than the refractive lens system. The novel design is an effective solution to the problem of the low transmission rate of traditional UV refractive lens systems.

Analytic Design of Segmented Phase Grating for Optical Sensing in High-Precision Alignment System.

Ultra-precision measurement systems are important for semiconductor manufacturing processes. In a phase grating sensing alignment (PGA) system, the measurement accuracy largely depends on the intensity of the diffraction signal and its signal-to-noise ratio (SNR), both of which are associated with the grating structure. Although an equally segmented grating structure could increase the signal of a high odd order, it could also strengthen the signals at the zeroth and even orders which are the main contributors of stray light. This paper focuses on the practical problem of differently responding diffraction orders but in one grating structure. An analytical relationship has been established between the diffraction efficiency and the segment structure of phase grating. According to this analytic model, we then propose a design method to increase the diffraction signal at high odd orders and, meanwhile, to decrease it at the zeroth and even orders. The proposed method provides a fast and effective way to obtain the globally optimal grating structure in the valid scope. Furthermore, the design examples are also verified by means of numerical simulation tool-rigorous coupled-wave analysis (RCWA) software. As a result, the proposed method gives insight into the diffraction theory of segmented grating and the practical value to greatly improve the design efficiency.

Measurement and compensation of misalignment in double-sided hard X-ray Fresnel zone plates.

Double-sided Fresnel zone plates are diffractive lenses used for high-resolution hard X-ray microscopy. The double-sided structures have significantly higher aspect ratios compared with single-sided components and hence enable more efficient imaging. The zone plates discussed in this paper are fabricated on each side of a thin support membrane, and the alignment of the zone plates with respect to each other is critical. Here, a simple and reliable way of quantifying misalignments by recording efficiency maps and measuring the absolute diffraction efficiency of the zone plates as a function of tilting angle in two directions is presented. The measurements are performed in a setup based on a tungsten-anode microfocus X-ray tube, providing an X-ray energy of 8.4 keV through differential measurements with a Cu and an Ni filter. This study investigates the sources of the misalignments and concludes that they can be avoided by decreasing the structure heights on both sides of the membrane and by pre-programming size differences between the front- and back-side zone plates.

A high-efficiency and high-spectral-resolution EUV/soft X-ray monochromator based on off-plane diffraction.

The most efficient diffraction at a periodic grating structure is expected to take place when the incident radiation can be considered to have been specularly reflected off the inclined part of grooves that are positioned parallel to the trajectory of the incident beam. Very encouraging results for this configuration, in which the diffraction takes place off-plane, have been reported recently for a grating to be used in a spectrometer for space science investigations. This grating provided high efficiency for a relatively large groove density and a large blaze angle. High efficiency was observed even in higher diffraction orders up to the fourth order. Here the performance parameters, especially for the combination of diffraction efficiency and achievable spectral resolution, will be discussed for a grating used in a grazing-incidence plane-grating monochromator for monochromatization of synchrotron radiation in the extreme ultraviolet (EUV) and soft X-ray range with photon energies between 30 eV and 2000 eV. It is found that the instrument can provide competitive spectral resolution in comparison with the use of in-plane diffraction. In the case of comparable spectral resolution, the off-plane diffraction is found to provide superior efficiency.

On smart optimization of blazed soft X-ray gratings.

The first attempts to calculate the diffraction efficiencies of gratings in the soft X-ray range were made on a scalar model. The results were simple analytical equations, that always severely overestimated the performance of real objects. In this respect, computer programs were found to be more successful, which rigorously consider all diffracted and refracted waves. Consequently soft X-ray gratings are presently optimized using these tools, which requires rather extensive calculations for any instrument optimization as general trends are not immediately obvious. Here it will be shown that the results of the rigorous calculations for gratings with blaze or sawtooth profile can be approximated rather well with a simple analytical equation. This equation contains three multiplicative factors, which deal independently with the effect of the reflectivity, the blaze angle and the groove density. This opens the possibility to initially ignore the effects of the blaze angle and thus to start an optimization in a very general way. Such optimization can be based on isoreflectivity curves and it can then provide `blaze maximum efficiency maps', i.e. simple images. In these latter images, one can identify directly the optimum parameters for a grating, i.e. the groove density providing best efficiency for a requested spectral resolving power. Only successively will the blaze angle have to be fixed. Its choice is then not the result of an extensive optimization process but of a simple calculation applied for the photon energy at which maximum efficiency performance is requested. The maps presented here are used for the optimization of a medium-resolving-power soft X-ray monochromator, which can scan the photon energy range 300-2000 eV.

On the advantages of operation in second-order diffraction of blazed gratings in soft X-ray monochromators.

The fact that a diffraction grating can provide twofold-smaller bandwidth when operated in second-order diffraction is long known and applied routinely in the laboratory for spectroscopy in the visible and ultraviolet spectral range. A similar routine operation in monochromators for the soft X-ray range is not reported yet. This study will thus address the feasibility of efficient diffraction of soft X-rays in the second order at reflection gratings when operated at grazing angles of incidence. The related systematic study could make profitable use of a recently introduced simple analytical equation for the prediction of the diffraction efficiency of blazed gratings with an ideal sawtooth profile. The predictions are then verified by use of rigorous calculations. The principle finding is that, by operation of gratings with lower groove densities, and thus with higher efficiencies, in higher order diffraction, one can extend the tuning in existing instruments with mechanical/optical limitations to larger photon energies. The performance in terms of transmission and spectral resolving power can be very similar to the performance of a grating with a larger groove density, which would otherwise have to be used for accessing the same energy range. This would allow operation of a single highly efficient grating over a larger photon energy interval at a modern synchrotron radiation source, e.g. from 0.3 to 2.2 keV. Without any requirement for a sophisticated grating exchange scheme, a related instrument promises to be sufficiently stable for the needs imposed by the improvements in source point stability at diffraction-limited storage rings.

Characterizing transmissive diamond gratings as beam splitters for the hard X-ray single-shot spectrometer of the European XFEL.

The European X-ray Free Electron Laser (EuXFEL) offers intense, coherent femtosecond pulses, resulting in characteristic peak brilliance values a billion times higher than that of conventional synchrotron facilities. Such pulses result in extreme peak radiation levels of the order of terawatts cm-2 for any optical component in the beam and can exceed the ablation threshold of many materials. Diamond is considered the optimal material for such applications due to its high thermal conductivity (2052 W mK-1 at 300 K) and low absorption for hard X-rays. Grating structures were fabricated on free-standing CVD diamond of 10 µm thickness with 500 µm silicon substrate support. The grating structures were produced by electron-beam lithography at the Laboratory for Micro- and Nanotechnology, Paul Scherrer Institut, Switzerland. The grating lines were etched to a depth of 1.2 µm, resulting in an aspect ratio of 16. The characterization measurements with X-rays were performed on transmissive diamond gratings of 150 nm pitch at the P10 beamline of PETRA III, DESY. In this paper, the gratings are briefly described, and a measured diffraction efficiency of 0.75% at 6 keV in the first-order diffraction is shown; the variation of the diffraction efficiency across the grating surface is presented.

High-efficiency X-ray multilayer-coated blazed gratings with shifted boundaries.

A new design for a high-efficiency multilayer-coated blazed X-ray grating with horizontal-shifted (non-conformal) boundary profiles is proposed. The investigation of the grating design is carried out using an integrated approach based on rigorous numerical calculations of light diffraction by gratings with realistic boundary profiles obtained from simulations of multilayer grating growth. By varying the incidence angle of the deposition flux, one can set the direction and magnitude of the boundary profile shifts over a wide range of values. It is shown that the diffraction efficiency of the blazed gratings with shifted boundary profiles may be substantially higher than the efficiency of gratings with conformal boundaries, which are, moreover, much more difficult to produce. High-efficiency gratings with shifted boundaries can be obtained when the deposition is mainly on the blaze facet with a high inclination of the deposition flux, as opposed to widely used near-normal deposition methods. The maximum absolute efficiency of a W/B4C 2500 mm-1 grating with a blaze angle of 1.76° and an anti-blaze angle of 20°, working at a blaze wavelength of 1.3 nm and having shifted realistic boundary profiles, obtained using our integrated approach is 23.3%, while that of a grating with the ideal (triangular) boundary profile and the same shifts is 25.3%, and that of an ideal conformal profile is only 22.2%. The maximum absolute efficiency of 40.2% of a 2500 mm Cr/C grating with a blaze angle of 1.05° and a realistic anti-blaze angle of 10°, working at a blaze wavelength of 0.83 nm and having ideal shifted boundaries, is higher than the maximum efficiency of the similar grating having ideal conformal boundaries with a non-realistic anti-blaze angle of 80°.

Gelatin as a Photosensitive Material.

Because this issue journal is dedicated to Gelatin, here we present a few applications of gelatin in the field of optics. Optics is the science that studies the production, propagation, interaction and detection of light. Various materials sensitive to light (photosensitive) are used for detection of light, such as photomultipliers, CCDs, crystals, two dimensional (2D) materials and more. Among the 2D materials, the most popular for several centuries has been gelatin based photographic emulsion, which records spatial distributions of light. More recently (1970), films made of Gelatin with Dichromate (DCG) and dyes have been used. We describe some characteristics and applications of these two photosensitive materials. We also describe examples where gelatin is used as a Relative Humidity (RH) sensor and in the fabrication of optical elements based on gelatin. This article is intended for researchers outside the optics community.

Extraction of enhanced, ultrashort laser pulses from a passive 10-MHz stack-and-dump cavity.

Periodic dumping of ultrashort laser pulses from a passive multi-MHz repetition-rate enhancement cavity is a promising route towards multi-kHz repetition-rate pulses with Joule-level energies at an unparalleled average power. Here, we demonstrate this so-called stack-and-dump scheme with a 30-m-long cavity. Using an acousto-optic modulator, we extract pulses of 0.16 mJ at 30-kHz repetition rate, corresponding to 65 stacked input pulses, representing an improvement in three orders of magnitude over previously extracted pulse energies. The ten times longer cavity affords three essential benefits over former approaches. First, the time between subsequent pulses is increased to 100 ns, relaxing the requirements on the switch. Second, it allows for the stacking of strongly stretched pulses (here from 800 fs to 1.5 ns), thus mitigating nonlinear effects in the cavity optics. Third, the choice of a long cavity offers increased design flexibility with regard to thermal robustness, which will be crucial for future power scaling. The herein presented results constitute a necessary step towards stack-and-dump systems providing access to unprecedented laser parameter regimes.

Photorefractivity and photocurrent dynamics of triphenylamine-based polymer composites.

The photorefractive properties of triphenylamine polymer-based composites with various composition ratios were investigated via optical diffraction, response time, asymmetric energy transfer, and transient photocurrent. The composite consisted of a photoconductive polymer of poly((4-diphenylamino)benzyl acrylate), a photoconductive plasticizer of (4-diphenylamino)phenyl)methanol, a sensitizer of [6,6]-phenyl-C61-butyric acid methyl ester, and a nonlinear optical dye of (4-(azepan-1-yl)-benzylidene)malononitrile. The photorefractive properties and related quantities were dependent on the composition, which was related to the glass transition temperature of the photorefractive polymers. The quantum efficiency (QE) of photocarrier generation was evaluated from the initial slope of the transient photocurrent. Transient photocurrents were measured and showed two unique peaks: one in the range of 10-4 to 10-3 s and the other in the range of 10-1 to 1 s. The transient photocurrents was well simulated (or reproduced) by the expanded two-trapping site model with two kinds of photocarrier generation and recombination processes and two different trapping sites. The obtained photorefractive quantity of trap density was significantly related to the photoconductive parameters of QE.

Storage Optimization of Transmission Holographic Gratings in Photohydrogels.

The development and optimization of holographic materials represent a great challenge today. These materials must be synthesized according to the characteristics that are desirable in photonic devices whose application is the object of investigation. In certain holographic sensors and biosensors, it is essential that the recording material be stable in liquid media. Furthermore, the holographic gratings stored in them must have temporal and structural stability, so that they can act as transducers of the analytical signal. Therefore, it is essential to optimize its storage in terms of the chemical composition of the material and the optical parameters of recording. This work focuses on the study of the storage optimization of unslanted transmission volume phase holograms in photohydrogels based on acrylamide and N,N'-methylenebis(acrylamide). Hydrogel matrices, also composed of acrylamide and N,N'-methylenebis(acrylamide), with different degrees of cross-linking were used and analyzed by scanning electron microscopy and UV-visible spectroscopy. The best results in terms of diffraction efficiency were reached for hydrogel matrices with an acrylamide/N,N'-methylenebis(acrylamide) molar ratio between 19.9 and 26. This relationship was also optimized in the incubator solution used to incorporate the components necessary for the formation of the holograms in the hydrogel matrices. The maximum diffraction efficiency, about 35%, was achieved when using an incubation solution with an acrylamide/N,N'-methylenebis(acrylamide) molar ratio of 4.35. The influence of the physical thickness of the hydrogel layers, the intensity, and the exposure time on the diffraction efficiency was also investigated and optimized. In addition, the behavior of the hologram was analyzed after a washing stage with PBST. A simple model that considered the effects of bending and attenuation of holographic gratings was proposed and used to obtain the optical parameters of the holograms.

Holographic Recording of Unslanted Volume Transmission Gratings in Acrylamide/Propargyl Acrylate Hydrogel Layers: Towards Nucleic Acids Biosensing.

The role of volume hydrogel holographic gratings as optical transducers in sensor devices for point-of-care applications is increasing due to their ability to be functionalized for achieving enhanced selectivity. The first step in the development of these transducers is the optimization of the holographic recording process. The optimization aims at achieving gratings with reproducible diffraction efficiency, which remains stable after reiterative washings, typically required when working with analytes of a biological nature or several step tests. The recording process of volume phase transmission gratings within Acrylamide/Propargyl Acrylate hydrogel layers reported in this work was successfully performed, and the obtained diffraction gratings were optically characterized. Unslanted volume transmission gratings were recorded in the hydrogel layers diffraction efficiencies; up to 80% were achieved. Additionally, the recorded gratings demonstrated stability in water after multiple washing steps. The hydrogels, after functionalization with oligonucleotide probes, yields a specific hybridization response, recognizing the complementary strand as demonstrated by fluorescence. Analyte-sensitive hydrogel layers with holographic structures are a promising candidate for the next generation of in vitro diagnostic tests.

Holographic Grating Enhancement Induced by a Dual-Photo-Initiator System in PMMA Substrate Polymers.

Polymer systems induced by the reaction between monomers and photo-initiators play a crucial role in the formation of volume-phase gratings. In this paper, we fabricated a dual-photo-initiator photopolymer by doping EY (Eosin Yellow) molecules into a TI (Titanocene, Irgacure 784@BASF) dispersed PMMA (poly-[methyl methacrylate]) substrate system, with the aim of promoting the diffusion and polymerization processes in volume holographic storage. The two-wave interference system is adopted to record a permanent grating structure in our materials. The temporal diffraction variations of photopolymerization (during the interference exposure) and dark diffusion (after the interference exposure) processes have been investigated and analyzed. Aiming to analyze the influence of EY doping ratios on holographic performances, some key parameters were examined in the experiment. We first measured the temporal evolution of diffraction efficiency, then an exponential fitting was adopted to obtain the response time. Finally, the angular selectivity was evaluated by the Bragg condition after holographic recording. Also, the temporal evolution of each component is described by the nonlocal polymerization-driven diffusion model with a dual-photo-initiator composition, theoretically. Furthermore, we experimentally achieved the holographic grating enhancement in both the dark diffusion and photopolymerization processes by doping appropriate EY concentrations, respectively. This work provides a foundation for the acceptability of TI&EY/PMMA polymers in further holographic storage research.

Design of 4.7 µm High-Efficiency Hybrid Dielectric Reflection Gratings.

Traditional reflective diffraction gratings working at 4.7 µm are fabricated by metal coatings. Due to the absorption of the metal itself, the diffraction efficiency (DE) could not reach over 95%. In this paper, we propose a 3 µm period multilayer grating design using hybrid multilayer dielectrics. With a layer of 0.353 µm Si and a layer of 0.905 µm SiO2 forming the rectangular grating, the maximum of larger than 99.99% and the overall first-order DE reached 97.88%. The usable spectrum width is larger than 0.2 µm, more than four times larger than that of the pure Si rectangular grating. This high DE multilayer grating is an ideal element for high-power laser systems with the spectrum beam combining method.

Design of a High-Efficiency Multilayer Dielectric Diffraction Grating with Enhanced Laser Damage Threshold.

Diffraction gratings are becoming increasingly widespread in optical applications, notably in lasers. This study presents the work on the characterization and evaluation of Multilayer Dielectric Diffraction Gratings (MDG) based on the finite element method using Comsol MultiPhysics software. The optimal multilayer dielectric diffraction grating structure using a rectangular three-layer structure consisting of an aluminum oxide Al2O3 layer sandwiched between two silicon dioxide SiO2 layers on a multilayer dielectric mirror is simulated. Results show that this MDG for non-polarized lasers at 1064 nm with a significantly enhanced -1st diffraction efficiency of 97.4%, reaching 98.3% for transverse-electric (TE) polarization and 96.3% for transverse-magnetic (TM) polarization. This design is also preferable in terms of the laser damage threshold (LDT) because most of the maximum electric field is spread across the high LDT material SiO2 for TE polarization and scattered outside the grating for TM polarization. This function allows the system to perform better and be more stable than normal diffraction grating under a high-intensity laser.

Optimization of Optical Phase Profile in Beam Deflector with Advanced Simulation Method for High Diffraction Efficiency.

Controlling the phase of light with a high efficiency and precision is essential for applications in imaging, tunable devices, and optical systems. Spatial light modulators (SLMs) based on liquid crystals (LCs) have been regarded as one of the best choices for the generation of phase profiles for the steering of light. The upper glass substrate has an unpatterned electrode for a common electrode, while the lower glass substrate has one-dimensional micro-patterned electrodes for controlling the single pixel level by the applied voltages. By applying different voltages to each electrode to create a sawtooth-shaped phase profile, the collimated input beam is deflected to the desired angle. To maximize the diffraction efficiency (DE) values, an advanced simulation method has been developed to find the optimized phase profile through the analysis of LC director distributions. The resulting diffraction patterns are investigated both computationally and experimentally, with a good agreement between the results obtained. Finally, the beam deflector (BD) system with an advanced driving algorithm has a high 1st order DE, about 60%, 37%, and 7.5% at 1°, 2.5°, and a maximum steering angle of 7.5°, respectively. The LC director distributions in relation to various diffraction angles are simulated and an experimental success in realizing enhanced DE for the beam steering device is presented.

Optimal Design and Analysis of 4.7 µm Hybrid Deep Dielectric High Efficiency Transmission Gratings.

There is currently no transmission grating with good diffraction efficiency in the 4.7 µm band. Metal gratings at this wavelength are all reflective gratings which has a diffraction efficiency of lower than 90% and lower laser damage threshold. In this paper, we bring up a design of a multi-layer transmission grating with both high diffraction efficiency and wide working wavelength band. We have proved that the transmission grating made of composite materials has an average diffraction effectiveness of more than 96% throughout the whole spectral range of 200 nm. Meanwhile, the theoretically computed transmission grating has a highest first-order diffraction efficiency of more than 99.77% at 4746 nm. This multilayer dielectric film transmission grating's optimized design may further boost spectral beam combining power, providing a practical technique for increasing SBC power and brightness.

Membrane-Fresnel Diffractive Lenses with High-Optical Quality and High-Thermal Stability.

The membrane-Fresnel diffractive lens (M-FDL) has great potential in the field of high-resolution and lightweight imaging in orbit. However, the M-FDL with high-optical quality and high-thermal stability cannot be fabricated to a standard by the existing processing methods. In this paper, we propose a method for fabricating an M-FDL composed of three steps: the improved repeated spin-coating of the polyimide (PI) membrane, the secondary mucosal method of silica-framed membrane mirror, and the high-precision fabrication of a multi-level microstructure on a flexible, ultrathin membrane substrate. The results show that the root mean square (RMS) of the wave-front error for M-FDL obtained by the above method is 1/28λ (F# = 8.7 at 632.8 nm) with an 80 mm clear aperture, the average diffraction efficiency is more than 70%, the silica-framed membrane mirror possesses approximately 40 times the overall thermal stability of the traditional metal-framed mirror, and the weight is less than 40 g. The measurement results indicate that the M-FDL has high-optical quality and high-thermal stability and can satisfy the imaging requirements.

Design and Fabrication of Silicon-Blazed Gratings for Near-Infrared Scanning Grating Micromirror.

Blazed gratings are the critical dispersion elements in spectral analysis instruments, whose performance depends on structural parameters and topography of the grating groove. In this paper, high diffraction efficiency silicon-blazed grating working at 800-2500 nm has been designed and fabricated. By diffraction theory analysis and simulation optimization based on the accurate boundary integral equation method, the blaze angle and grating constant are determined to be 8.8° and 4 µm, respectively. The diffraction efficiency is greater than 33.23% in the spectral range of 800-2500 nm and reach the maximum value of 85.62% at the blaze wavelength of 1180 nm. The effect of platform and fillet on diffraction efficiency is analyzed, and the formation rule and elimination method of the platform are studied. The blazed gratings are fabricated by anisotropic wet etching process using tilted (111) silicon substrate. The platform is minished by controlling etching time and oxidation sharpening process. The fillet radius of the fabricated grating is 50 nm, the blaze angle is 7.4°, and the surface roughness is 0.477 nm. Finally, the blazed grating is integrated in scanning micromirror to form scanning grating micromirror by MEMS fabrication technology, which can realize both optical splitting and scanning. The testing results show that the scanning grating micromirror has high diffraction efficiency in the spectral range of 810-2500 nm for the potential near-infrared spectrometer application.