Influence of metal co-deposition on silicon nanodot patterning dynamics during ion-beam sputtering.
Nanotechnology
; 25(41): 415301, 2014 Oct 17.
Article
in En
| MEDLINE
| ID: mdl-25248515
Full text:
1
Collection:
01-internacional
Database:
MEDLINE
Language:
En
Journal:
Nanotechnology
Year:
2014
Type:
Article
Affiliation country:
Spain