Quantitative evaluations of a high-voltage multiscan CCD camera.

Electron detection characteristics such as modulation transfer function (MTF), detection quantum efficiency (DQE), dynamic range, linearity, average gain, and uniformity of a high-voltage multiscan CCD (HV-MSC, 1K x 1K pixels) camera were evaluated. This camera was used as a major recording medium in a high-voltage electron microscope (HVEM) installed at the Korea Basic Science Institute (KBSI). In spite of the high energy of the incident electrons, the overall properties of the HV-MSC camera were comparable to other CCD cameras for a low-voltage electron microscope (LVEM). In order to take full advantages of the properties of the HV-MSC camera for atomic resolution electron microscopy, we discuss optimal experimental conditions based on the detection properties.