Towards Microscale Flight: Fabrication, Stability Analysis, and Initial Flight Experiments for 300 µm × 300 µm × 1.5 µm Sized Untethered MEMS Microfliers.
IEEE Trans Nanobioscience
; 14(3): 323-31, 2015 Apr.
Article
en En
| MEDLINE
| ID: mdl-25955992
ABSTRACT
This paper presents modeling, designs, and initial experimental results demonstrating successful untethered microscale flight of stress-engineered microscale structures propelled by thermal forces. These MEMS Microfliers are 300 µm×300 µm×1.5 µm in size and are fabricated out of polycrystalline silicon using a surface micromachining process. A concave chassis, created using a novel in-situ masked post-release stress-engineering process, promotes static in-flight stability. High-speed optical micrography was used to capture image sequences of their flight, and this imagery was subsequently used to analyze their mid-flight performance. Our analysis, combined with finite element modeling (FEM) confirms stable flight of the microfliers within the thermal gradient above the heaters. This novel microscale flying platform presented in this paper may pave the way for new types of aerial microrobots.
Texto completo:
1
Colección:
01-internacional
Banco de datos:
MEDLINE
Asunto principal:
Aviación
/
Robótica
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Sistemas Microelectromecánicos
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Microtecnología
Idioma:
En
Revista:
IEEE Trans Nanobioscience
Asunto de la revista:
BIOTECNOLOGIA
Año:
2015
Tipo del documento:
Article