Low-Actuation Voltage MEMS Digital-to-Analog Converter with Parylene Spring Structures.
Sensors (Basel)
; 15(9): 21567-80, 2015 Aug 28.
Article
en En
| MEDLINE
| ID: mdl-26343682
ABSTRACT
We propose an electrostatically-actuated microelectromechanical digital-to-analog converter (M-DAC) device with low actuation voltage. The spring structures of the silicon-based M-DAC device were monolithically fabricated using parylene-C. Because the Young's modulus of parylene-C is considerably lower than that of silicon, the electrostatic microactuators in the proposed device require much lower actuation voltages. The actuation voltage of the proposed M-DAC device is approximately 6 V, which is less than one half of the actuation voltages of a previously reported M-DAC equipped with electrostatic microactuators. The measured total displacement of the proposed three-bit M-DAC is nearly 504 nm, and the motion step is approximately 72 nm. Furthermore, we demonstrated that the M-DAC can be employed as a mirror platform with discrete displacement output for a noncontact surface profiling system.
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Colección:
01-internacional
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MEDLINE
Idioma:
En
Revista:
Sensors (Basel)
Año:
2015
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Article
País de afiliación:
Taiwán