Design and Analysis of a High-Gain and Robust Multi-DOF Electro-thermally Actuated MEMS Gyroscope.

Saqib, Muhammad; Mubasher Saleem, Muhammad; Mazhar, Naveed; Awan, Saif Ullah; Shahbaz Khan, Umar

Saqib, Muhammad; Mubasher Saleem, Muhammad; Mazhar, Naveed; Awan, Saif Ullah; Shahbaz Khan, Umar.

Afiliación

Saqib M; Department of Electrical Engineering, National University of Sciences and Technology, Islamabad 44000, Pakistan. muhammad.saqib16@ee.ceme.edu.pk.
Mubasher Saleem M; Department of Mechatronics Engineering, National University of Sciences and Technology, Islamabad 44000, Pakistan. mubasher.saleem@ceme.nust.edu.pk.
Mazhar N; Department of Electrical Engineering, National University of Sciences and Technology, Islamabad 44000, Pakistan. naveed.mazhar@ceme.edu.pk.
Awan SU; Department of Electrical Engineering, National University of Sciences and Technology, Islamabad 44000, Pakistan. saifullahawan@ceme.nust.edu.pk.
Shahbaz Khan U; Department of Mechatronics Engineering, National University of Sciences and Technology, Islamabad 44000, Pakistan. u.shahbaz@ceme.nust.edu.pk.

Micromachines (Basel) ; 9(11)2018 Nov 05.

Article en En | MEDLINE | ID: mdl-30400677

Palabras clave

MEMS gyroscope; capacitive sensing; electro-thermal actuator; high gain; multi-DOF; non-resonant; robustness

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Texto completo: 1 Colección: 01-internacional Banco de datos: MEDLINE Idioma: En Revista: Micromachines (Basel) Año: 2018 Tipo del documento: Article País de afiliación: Pakistán

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