Effect of Palladium Electrode Patterns on Hydrogen Response Characteristics from a Sensor Based on Ta<sub>2</sub>O<sub>5</sub> Film on SiC at High Temperatures.

Choi, Kyeong-Keun; Kim, Seongjeen

Effect of Palladium Electrode Patterns on Hydrogen Response Characteristics from a Sensor Based on Ta₂O₅ Film on SiC at High Temperatures.

Choi, Kyeong-Keun; Kim, Seongjeen.

Afiliación

Choi KK; National Institute for Nanomaterials Technology (NINT), Pohang University of Science and Technology (POSTECH), Pohang 37666, Korea.
Kim S; Department of Electronic Engineering, Kyungnam University, Changwon 51767, Korea.

Sensors (Basel) ; 19(24)2019 Dec 12.

Article en En | MEDLINE | ID: mdl-31842347

Palabras clave

high temperature; hydrogen sensor; palladium electrode; pattern type; silicon carbide; tantalum oxide

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Texto completo: 1 Colección: 01-internacional Banco de datos: MEDLINE Idioma: En Revista: Sensors (Basel) Año: 2019 Tipo del documento: Article

Texto completo

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Texto completo: 1 Colección: 01-internacional Banco de datos: MEDLINE Idioma: En Revista: Sensors (Basel) Año: 2019 Tipo del documento: Article