High-speed Mueller matrix ellipsometer with microsecond temporal resolution.

ABSTRACT

A high-speed Mueller matrix ellipsometer (MME) based on photoelastic modulator (PEM) polarization modulation and division-of-amplitude polarization demodulation has been developed, with which a temporal resolution of 11 µs has been achieved for a Mueller matrix measurement. To ensure the accuracy and stability, a novel approach combining a fast Fourier transform algorithm and Bessel function expansion is proposed for the in-situ calibration of PEM. With the proposed calibration method, the peak retardance and static retardance of the PEM can be calibrated with high accuracy and sensitivity over an ultra large retardance variation range. Both static and dynamic measurement experiments have been carried out to show the high accuracy and stability of the developed MME, which can be expected to pave the way for in-situ and real-time monitoring for rapid reaction processes.