Lithography Technology for Micro- and Nanofabrication.

Baek, Dahee; Lee, Sang Hun; Jun, Bong-Hyun; Lee, Seung Hwan

Baek, Dahee; Lee, Sang Hun; Jun, Bong-Hyun; Lee, Seung Hwan.

Afiliación

Baek D; Department of Bionano Engineering, Hanyang University, Ansan, South Korea.
Lee SH; Department of Chemical and Biological Engineering, Hanbat National University, Daejeon, South Korea.
Jun BH; Department of Bioscience and Biotechnology, Konkuk University, Seoul, South Korea. bjun@konkuk.ac.kr.
Lee SH; Department of Bionano Engineering, Hanyang University, Ansan, South Korea. vincero78@hanyang.ac.kr.

Adv Exp Med Biol ; 1309: 217-233, 2021.

Article en En | MEDLINE | ID: mdl-33782874

Asunto(s)

Nanotecnología; Impresión; Semiconductores; Tecnología

Palabras clave

Colloidal lithography; Deformation lithography; Electron beam lithography; Focused ion beam lithography; Jet and flash imprint lithography; Lithography; Material-based lithography; Nanofabrication; Nanoimprint lithography; Photolithography

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Texto completo: 1 Colección: 01-internacional Banco de datos: MEDLINE Asunto principal: Impresión / Nanotecnología Idioma: En Revista: Adv Exp Med Biol Año: 2021 Tipo del documento: Article País de afiliación: Corea del Sur

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