Optimization of Sputtering Process for Medium Entropy Alloy Nanotwinned CoCrFeNi Thin Films by Taguchi Method.

Zhong, Jing-Yi; Wang, Jian-Jie; Ouyang, Fan-Yi

Zhong, Jing-Yi; Wang, Jian-Jie; Ouyang, Fan-Yi.

Afiliación

Zhong JY; Department of Engineering and System Science, National Tsing Hua University, Hsinchu 300044, Taiwan.
Wang JJ; Department of Engineering and System Science, National Tsing Hua University, Hsinchu 300044, Taiwan.
Ouyang FY; Department of Engineering and System Science, National Tsing Hua University, Hsinchu 300044, Taiwan.

Materials (Basel) ; 15(22)2022 Nov 20.

Article en En | MEDLINE | ID: mdl-36431722

Palabras clave

CoCrFeNi thin films; Taguchi method; magnetron sputtering; medium entropy alloys; nanotwinned structure

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Texto completo: 1 Colección: 01-internacional Banco de datos: MEDLINE Idioma: En Revista: Materials (Basel) Año: 2022 Tipo del documento: Article País de afiliación: Taiwán

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