Meta-Learned and TCAD-Assisted Sampling in Semiconductor Laser Annealing.

Rawat, Tejender Singh; Chang, Chung Yuan; Feng, Yen-Wei; Chen, ShihWei; Shen, Chang-Hong; Shieh, Jia-Min; Lin, Albert Shihchun

Rawat, Tejender Singh; Chang, Chung Yuan; Feng, Yen-Wei; Chen, ShihWei; Shen, Chang-Hong; Shieh, Jia-Min; Lin, Albert Shihchun.

Afiliación

Rawat TS; Institute of Electronics Engineering, National Yang Ming Chiao Tung University, 300, Hsinchu City30010, Taiwan, R.O.C.
Chang CY; Institute of Electronics Engineering, National Yang Ming Chiao Tung University, 300, Hsinchu City30010, Taiwan, R.O.C.
Feng YW; Institute of Electronics Engineering, National Yang Ming Chiao Tung University, 300, Hsinchu City30010, Taiwan, R.O.C.
Chen S; Taiwan Semiconductor Research Institute, No. 26, Prosperity Road I, Hsinchu Science Park, Hsinchu City300091, Taiwan, R.O.C.
Shen CH; Taiwan Semiconductor Research Institute, No. 26, Prosperity Road I, Hsinchu Science Park, Hsinchu City300091, Taiwan, R.O.C.
Shieh JM; Taiwan Semiconductor Research Institute, No. 26, Prosperity Road I, Hsinchu Science Park, Hsinchu City300091, Taiwan, R.O.C.
Lin AS; Institute of Electronics Engineering, National Yang Ming Chiao Tung University, 300, Hsinchu City30010, Taiwan, R.O.C.

ACS Omega ; 8(1): 737-746, 2023 Jan 10.

Article en En | MEDLINE | ID: mdl-36643440

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Texto completo: 1 Colección: 01-internacional Banco de datos: MEDLINE Tipo de estudio: Prognostic_studies Idioma: En Revista: ACS Omega Año: 2023 Tipo del documento: Article

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