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Design and Fabrication of Micro/Nano Sensors and Actuators.
Wang, Weidong; Yang, Ruiguo; Liu, Min.
Afiliación
  • Wang W; School of Mechano-Electronic Engineering, Xidian University, Xi'an 710071, China.
  • Yang R; Department of Mechanical and Materials Engineering, University of Nebraska-Lincoln, Lincoln, NE 68588, USA.
  • Liu M; School of Mechano-Electronic Engineering, Xidian University, Xi'an 710071, China.
Micromachines (Basel) ; 15(6)2024 May 22.
Article en En | MEDLINE | ID: mdl-38930644
ABSTRACT
A micro-electromechanical system (MEMS) is a micro device or system that utilizes large-scale integrated circuit manufacturing technology and microfabrication technology to integrate microsensors, micro-actuators, microstructures, signal processing and control circuits, power supplies, and communication interfaces into one or more chips [...].
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Texto completo: 1 Colección: 01-internacional Banco de datos: MEDLINE Idioma: En Revista: Micromachines (Basel) Año: 2024 Tipo del documento: Article País de afiliación: China
Texto completo
Imprimir
XML
PubMed Links
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Texto completo: 1 Colección: 01-internacional Banco de datos: MEDLINE Idioma: En Revista: Micromachines (Basel) Año: 2024 Tipo del documento: Article País de afiliación: China