Thermal stability studies of short period Sc/Cr and Sc/B4C/Cr multilayers.
Appl Opt
; 53(10): 2126-35, 2014 Apr 01.
Article
em En
| MEDLINE
| ID: mdl-24787171
ABSTRACT
The stability of short period Sc/Cr and Sc/B4C/Cr multilayers was investigated over a large temperature range. The aim was to find a stable reflective coating for an off-axis parabola for focusing x rays from a soft x-ray free-electron laser. Normal incidence reflectivity, surface roughness, and intrinsic stress were investigated as a function of annealing temperature and two samples were also studied with a high-resolution transmission electron microscope (TEM), a scanning TEM, and through electron energy loss spectroscopy (EELS). Interface-engineered Sc/B4C/Cr multilayers showed increased thermal stability and higher reflectivity as compared to pure Sc/Cr multilayers.
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Coleções:
01-internacional
Base de dados:
MEDLINE
Idioma:
En
Revista:
Appl Opt
Ano de publicação:
2014
Tipo de documento:
Article