The method for measuring the groove density of variable-line-space gratings with elimination of the eccentricity effect.

Wang, Qingbo; Liu, Zhengkun; Chen, Huoyao; Wang, Yu; Jiang, Xiaolong; Fu, Shaojun

Wang, Qingbo; Liu, Zhengkun; Chen, Huoyao; Wang, Yu; Jiang, Xiaolong; Fu, Shaojun.

Afiliação

Wang Q; National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei, China.
Liu Z; National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei, China.
Chen H; National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei, China.
Wang Y; National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei, China.
Jiang X; National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei, China.
Fu S; National Synchrotron Radiation Laboratory, University of Science and Technology of China, Hefei, China.

Rev Sci Instrum ; 86(2): 023109, 2015 Feb.

Article em En | MEDLINE | ID: mdl-25725825

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Rev Sci Instrum Ano de publicação: 2015 Tipo de documento: Article País de afiliação: China

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