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The wave optical whole process design of the soft X-ray interference lithography beamline at SSRF.
Xue, Chaofan; Meng, Xiangyu; Wu, Yanqing; Wang, Yong; Wang, Liansheng; Yang, Shumin; Zhao, Jun; Tai, Renzhong.
Afiliação
  • Xue C; Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai Synchrotron Radiation Facility, Shanghai 201800, People's Republic of China.
  • Meng X; Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai Synchrotron Radiation Facility, Shanghai 201800, People's Republic of China.
  • Wu Y; Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai Synchrotron Radiation Facility, Shanghai 201800, People's Republic of China.
  • Wang Y; Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai Synchrotron Radiation Facility, Shanghai 201800, People's Republic of China.
  • Wang L; Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai Synchrotron Radiation Facility, Shanghai 201800, People's Republic of China.
  • Yang S; Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai Synchrotron Radiation Facility, Shanghai 201800, People's Republic of China.
  • Zhao J; Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai Synchrotron Radiation Facility, Shanghai 201800, People's Republic of China.
  • Tai R; Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai Synchrotron Radiation Facility, Shanghai 201800, People's Republic of China.
J Synchrotron Radiat ; 25(Pt 6): 1869-1876, 2018 Nov 01.
Article em En | MEDLINE | ID: mdl-30407200
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: J Synchrotron Radiat Assunto da revista: RADIOLOGIA Ano de publicação: 2018 Tipo de documento: Article
Texto completo
Imprimir
XML
PubMed Links
Buscar no Google

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: J Synchrotron Radiat Assunto da revista: RADIOLOGIA Ano de publicação: 2018 Tipo de documento: Article