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A Geometrical Study on the Roof Tile-Shaped Modes in AlN-Based Piezoelectric Microcantilevers as Viscosity⁻Density Sensors.
Ruiz-Díez, Víctor; Toledo, Javier; Hernando-García, Jorge; Ababneh, Abdallah; Seidel, Helmut; Sánchez-Rojas, José Luis.
Afiliação
  • Ruiz-Díez V; Microsystems, Actuators and Sensors Group, Universidad de Castilla-La Mancha, 13071 Ciudad Real, Spain. victor.ruiz@uclm.es.
  • Toledo J; Microsystems, Actuators and Sensors Group, Universidad de Castilla-La Mancha, 13071 Ciudad Real, Spain. javier.toledo.serrano@gmail.com.
  • Hernando-García J; Microsystems, Actuators and Sensors Group, Universidad de Castilla-La Mancha, 13071 Ciudad Real, Spain. Jorge.Hernando@uclm.es.
  • Ababneh A; Electronic Engineering Department, Hijjawi Faculty for Engineering Technology, Yarmouk University, 21163 Irbid, Jordan. a.ababneh@lmm.uni-saarland.de.
  • Seidel H; Chair of Micromechanics, Microfluidics/Microactuators, Faculty of Natural Sciences and Technology II, Saarland University, 66123 Saarbrücken, Germany. seidel@LMM.Uni-saarland.de.
  • Sánchez-Rojas JL; Microsystems, Actuators and Sensors Group, Universidad de Castilla-La Mancha, 13071 Ciudad Real, Spain. JoseLuis.SAldavero@uclm.es.
Sensors (Basel) ; 19(3)2019 Feb 06.
Article em En | MEDLINE | ID: mdl-30736296
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Sensors (Basel) Ano de publicação: 2019 Tipo de documento: Article País de afiliação: Espanha
Texto completo
Imprimir
XML
PubMed Links
Buscar no Google

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Sensors (Basel) Ano de publicação: 2019 Tipo de documento: Article País de afiliação: Espanha