Design and Simulation of a Wireless SAW-Pirani Sensor with Extended Range and Sensitivity.

Toto, Sofia; Nicolay, Pascal; Morini, Gian Luca; Rapp, Michael; Korvink, Jan G; Brandner, Juergen J

Toto, Sofia; Nicolay, Pascal; Morini, Gian Luca; Rapp, Michael; Korvink, Jan G; Brandner, Juergen J.

Afiliação

Toto S; Institute of Microstructure Technology, Karlsruhe Institute of Technology, Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany. sofia.toto@kit.edu.
Nicolay P; Carinthia Institute for Smart Materials and Manufacturing Technologies (CiSMAT), Carinthia University of Applied Sciences, 9524 Villach/St. Magdalen, Austria. p.nicolay@fh-kaernten.at.
Morini GL; Dipartimento di Ingegneria Industriale, Alma Mater Studiorum Università di Bologna, Viale Risorgimento 2, I-40136 Bologna, Italy. gianluca.morini3@unibo.it.
Rapp M; Institute of Microstructure Technology, Karlsruhe Institute of Technology, Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany. p.nicolay@fh-kaernten.at.
Korvink JG; Institute of Microstructure Technology, Karlsruhe Institute of Technology, Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany. jan.korvink@kit.edu.
Brandner JJ; Institute of Microstructure Technology, Karlsruhe Institute of Technology, Hermann-von-Helmholtz-Platz 1, 76344 Eggenstein-Leopoldshafen, Germany. juergen.brandner@kit.edu.

Sensors (Basel) ; 19(10)2019 May 27.

Article em En | MEDLINE | ID: mdl-31137915

Palavras-chave

Pirani; surface acoustic waves; vacuum sensor; wireless sensors

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Tipo de estudo: Diagnostic_studies Idioma: En Revista: Sensors (Basel) Ano de publicação: 2019 Tipo de documento: Article País de afiliação: Alemanha

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