Unraveling structural and compositional information in 3D FinFET electronic devices.

Trombini, Henrique; Marmitt, Gabriel Guterres; Alencar, Igor; Baptista, Daniel Lorscheitter; Reboh, Shay; Mazen, Frédéric; Pinheiro, Rafael Bortolin; Sanchez, Dario Ferreira; Senna, Carlos Alberto; Archanjo, Bráulio Soares; Achete, Carlos Alberto; Grande, Pedro Luis

Trombini, Henrique; Marmitt, Gabriel Guterres; Alencar, Igor; Baptista, Daniel Lorscheitter; Reboh, Shay; Mazen, Frédéric; Pinheiro, Rafael Bortolin; Sanchez, Dario Ferreira; Senna, Carlos Alberto; Archanjo, Bráulio Soares; Achete, Carlos Alberto; Grande, Pedro Luis.

Afiliação

Trombini H; Ion Implantation Laboratory, Institute of Physics, Federal University of Rio Grande do Sul, CEP, 91501-970, Porto Alegre, Brazil. henrique.trombini@ufrgs.br.
Marmitt GG; Ion Implantation Laboratory, Institute of Physics, Federal University of Rio Grande do Sul, CEP, 91501-970, Porto Alegre, Brazil.
Alencar I; Ion Implantation Laboratory, Institute of Physics, Federal University of Rio Grande do Sul, CEP, 91501-970, Porto Alegre, Brazil.
Baptista DL; Ion Implantation Laboratory, Institute of Physics, Federal University of Rio Grande do Sul, CEP, 91501-970, Porto Alegre, Brazil.
Reboh S; CEA-LETI, MINATEC Campus, F-38054, Grenoble, France.
Mazen F; CEA-LETI, MINATEC Campus, F-38054, Grenoble, France.
Pinheiro RB; CEA-LETI, MINATEC Campus, F-38054, Grenoble, France.
Sanchez DF; Paul Scherrer Instituit, 5232, Villigen, Switzerland.
Senna CA; National Institute of Metrology, Quality and Technology, CEP, 25250-020, Duque de Caxias, Brazil.
Archanjo BS; National Institute of Metrology, Quality and Technology, CEP, 25250-020, Duque de Caxias, Brazil.
Achete CA; National Institute of Metrology, Quality and Technology, CEP, 25250-020, Duque de Caxias, Brazil.
Grande PL; Ion Implantation Laboratory, Institute of Physics, Federal University of Rio Grande do Sul, CEP, 91501-970, Porto Alegre, Brazil.

Sci Rep ; 9(1): 11629, 2019 Aug 12.

Article em En | MEDLINE | ID: mdl-31406211

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Sci Rep Ano de publicação: 2019 Tipo de documento: Article País de afiliação: Brasil

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