Diamond nanofocusing refractive X-ray lenses made by planar etching technology.
J Synchrotron Radiat
; 26(Pt 5): 1554-1557, 2019 Sep 01.
Article
em En
| MEDLINE
| ID: mdl-31490143
ABSTRACT
The manufacturing steps and first tests of a refractive lens made of polycrystalline diamond are described. A fabrication process based on electron-beam lithography and deep reactive ion etching is introduced. Experimental tests on beamline ID13 at the ESRF have been performed. A spot size of 360â
nm (FWHM) at an energy E = 24.3â
keV is observed.
Texto completo:
1
Coleções:
01-internacional
Base de dados:
MEDLINE
Idioma:
En
Revista:
J Synchrotron Radiat
Assunto da revista:
RADIOLOGIA
Ano de publicação:
2019
Tipo de documento:
Article
País de afiliação:
Alemanha