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Amorphous IGZO TFT with High Mobility of ∼70 cm2/(V s) via Vertical Dimension Control Using PEALD.
Sheng, Jiazhen; Hong, TaeHyun; Lee, Hyun-Mo; Kim, KyoungRok; Sasase, Masato; Kim, Junghwan; Hosono, Hideo; Park, Jin-Seong.
Afiliação
  • Sheng J; Division of Materials Science and Engineering , Hanyang University , Seoul 04763 , Republic of Korea.
  • Hong T; Division of Materials Science and Engineering , Hanyang University , Seoul 04763 , Republic of Korea.
  • Lee HM; Division of Materials Science and Engineering , Hanyang University , Seoul 04763 , Republic of Korea.
  • Kim K; Division of Materials Science and Engineering , Hanyang University , Seoul 04763 , Republic of Korea.
  • Sasase M; Materials Research Center for Element Strategy , Tokyo Institute of Technology , Mailbox SE-1, 4259 Nagatsuta , Midori-ku, Yokohama 226-8503 , Japan.
  • Kim J; Materials Research Center for Element Strategy , Tokyo Institute of Technology , Mailbox SE-1, 4259 Nagatsuta , Midori-ku, Yokohama 226-8503 , Japan.
  • Hosono H; Materials Research Center for Element Strategy , Tokyo Institute of Technology , Mailbox SE-1, 4259 Nagatsuta , Midori-ku, Yokohama 226-8503 , Japan.
  • Park JS; Division of Materials Science and Engineering , Hanyang University , Seoul 04763 , Republic of Korea.
ACS Appl Mater Interfaces ; 11(43): 40300-40309, 2019 Oct 30.
Article em En | MEDLINE | ID: mdl-31584254
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: ACS Appl Mater Interfaces Assunto da revista: BIOTECNOLOGIA / ENGENHARIA BIOMEDICA Ano de publicação: 2019 Tipo de documento: Article
Texto completo
Imprimir
XML
PubMed Links
Buscar no Google

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: ACS Appl Mater Interfaces Assunto da revista: BIOTECNOLOGIA / ENGENHARIA BIOMEDICA Ano de publicação: 2019 Tipo de documento: Article