High-Figure-of-Merit X-Cut Lithium Niobate MEMS Resonators Operating Around 50 MHz for Large Passive Voltage Amplification in Radio Frequency Applications.
IEEE Trans Ultrason Ferroelectr Freq Control
; 67(7): 1392-1402, 2020 Jul.
Article
em En
| MEDLINE
| ID: mdl-32054573
ABSTRACT
This article reports on the modeling, design, fabrication, and testing of high-performance X-cut lithium niobate (LN) laterally vibrating resonators (LVRs) operating around 50 MHz. The objective of this work is to exploit the high figure of merit (FoM)-product of quality factor at series resonance ( Qs ) and electromechanical coupling ( kt2 )-to provide for large passive voltage amplification in the front end of emerging radio frequency (RF) applications, i.e., wake-up radio receivers (WuRx). Finite-element analysis (FEA) is performed to optimize the devices' geometry and ensure simultaneous high Qs and kt2 . Resonators exhibiting and % are demonstrated, with FoM >1650-the highest value recorded for resonators in the megahertz range to the best of our knowledge. Finally, passive voltage gains between 35 and 57 V/V are showcased for capacitive loads ranging from 400 fF to 1 pF.
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1
Coleções:
01-internacional
Base de dados:
MEDLINE
Tipo de estudo:
Prognostic_studies
Idioma:
En
Revista:
IEEE Trans Ultrason Ferroelectr Freq Control
Assunto da revista:
MEDICINA NUCLEAR
Ano de publicação:
2020
Tipo de documento:
Article