The Design of a Frame-Like ZnO FBAR Sensor for Achieving Uniform Mass Sensitivity Distributions.

Zhao, Xueli; Zhao, Zinan; Wang, Bin; Qian, Zhenghua; Ma, Tingfeng

Zhao, Xueli; Zhao, Zinan; Wang, Bin; Qian, Zhenghua; Ma, Tingfeng.

Afiliação

Zhao X; State Key Laboratory of Mechanics and Control of Mechanical Structures, College of Aerospace Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China.
Zhao Z; State Key Laboratory of Mechanics and Control of Mechanical Structures, College of Aerospace Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China.
Wang B; State Key Laboratory of Mechanics and Control of Mechanical Structures, College of Aerospace Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China.
Qian Z; State Key Laboratory of Mechanics and Control of Mechanical Structures, College of Aerospace Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing 210016, China.
Ma T; Piezoelectric Device Laboratory, School of Mechanical Engineering and Mechanics, Ningbo University, Ningbo 315211, China.

Sensors (Basel) ; 20(8)2020 Apr 23.

Article em En | MEDLINE | ID: mdl-32340295

Palavras-chave

FBAR mass sensor; frame-like driving electrode; thickness-extensional mode; uniform mass sensitivity distribution

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Tipo de estudo: Diagnostic_studies Idioma: En Revista: Sensors (Basel) Ano de publicação: 2020 Tipo de documento: Article País de afiliação: China

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