Band gap measurement by nano-beam STEM with small off-axis angle transmission electron energy loss spectroscopy (TEELS).
Ultramicroscopy
; 220: 113164, 2021 Jan.
Article
em En
| MEDLINE
| ID: mdl-33186852
ABSTRACT
An energy band gap measurement method based on nano-beam STEM with small off-axis angle valence band transmission electron energy loss spectroscopy (TEELS) is reported. The effect of multiple scattering event is removed by self-convolution method to obtain a single scattering loss function and a dielectric function is calculated from the single scattering valence band energy loss function through Kramers-Kronig (K-K) analysis. Optical band gaps are extracted from energy loss spectra and the imaginary part of the dielectric functions for crystalline and amorphous SiOx, SiNx, and SiON through linear fitting of on-set regions yielding results that are independent of sample thickness. The TEELS band gap data are consistent with those obtained from reflection electron energy loss spectroscopy (REELS) measurements.
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Coleções:
01-internacional
Base de dados:
MEDLINE
Idioma:
En
Revista:
Ultramicroscopy
Ano de publicação:
2021
Tipo de documento:
Article