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The Wafer-Level Integration of Single-Crystal LiNbO3 on Silicon via Polyimide Material.
Yang, Xiangyu; Geng, Wenping; Bi, Kaixi; Mei, Linyu; Li, Yaqing; He, Jian; Mu, Jiliang; Hou, Xiaojuan; Chou, Xiujian.
Afiliação
  • Yang X; Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China.
  • Geng W; Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China.
  • Bi K; Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China.
  • Mei L; School of Mechanical Engineering, North University of China, Taiyuan 030051, China.
  • Li Y; Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China.
  • He J; Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China.
  • Mu J; Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China.
  • Hou X; Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China.
  • Chou X; Science and Technology on Electronic Test and Measurement Laboratory, North University of China, Taiyuan 030051, China.
Micromachines (Basel) ; 12(1)2021 Jan 09.
Article em En | MEDLINE | ID: mdl-33435433
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Micromachines (Basel) Ano de publicação: 2021 Tipo de documento: Article País de afiliação: China
Texto completo
Imprimir
XML
PubMed Links
Buscar no Google

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Micromachines (Basel) Ano de publicação: 2021 Tipo de documento: Article País de afiliação: China