A Self-Calibration Stitching Method for Pitch Deviation Evaluation of a Long-Range Linear Scale by Using a Fizeau Interferometer.

Xiong, Xin; Shimizu, Yuki; Matsukuma, Hiraku; Gao, Wei

Xiong, Xin; Shimizu, Yuki; Matsukuma, Hiraku; Gao, Wei.

Afiliação

Xiong X; Department of Finemechanics, Tohoku University, Sendai 980-8579, Japan.
Shimizu Y; The State Key Lab of Fluid Power and Mechatronic Systems, Zhejiang University, Hangzhou 310027, China.
Matsukuma H; Department of Finemechanics, Tohoku University, Sendai 980-8579, Japan.
Gao W; Division of Mechanical and Space Engineering, Graduate School of Engineering, Hokkaido University, Kita 13, Nishi 8, Kita-ku, Sapporo 060-8628, Japan.

Sensors (Basel) ; 21(21)2021 Nov 08.

Article em En | MEDLINE | ID: mdl-34770718

Palavras-chave

linear scale; optical encoder; pitch deviation; self-calibration; stitching interferometry

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Tipo de estudo: Prognostic_studies Idioma: En Revista: Sensors (Basel) Ano de publicação: 2021 Tipo de documento: Article País de afiliação: Japão

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