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High-Precision Regulation of Nano-Grating Linewidth Based on ALD.
Zhang, Yaxin; Wang, Chenying; Jing, Weixuan; Wang, Song; Zhang, Yujing; Zhang, Liangliang; Zhang, Yijun; Zhu, Nan; Wang, Yunxiang; Zhao, Yifan; Lin, Qijing; Jiang, Zhuangde.
Afiliação
  • Zhang Y; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an 710049, China.
  • Wang C; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049, China.
  • Jing W; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an 710049, China.
  • Wang S; Collaborative Innovation Center of High-End Manufacturing, Xi'an Jiaotong University, Xi'an 710049, China.
  • Zhang Y; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an 710049, China.
  • Zhang L; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049, China.
  • Zhang Y; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an 710049, China.
  • Zhu N; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049, China.
  • Wang Y; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an 710049, China.
  • Zhao Y; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049, China.
  • Lin Q; State Key Laboratory for Manufacturing Systems Engineering, International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technologies, Xi'an Jiaotong University, Xi'an 710049, China.
  • Jiang Z; School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049, China.
Micromachines (Basel) ; 13(7)2022 Jun 24.
Article em En | MEDLINE | ID: mdl-35888812
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Micromachines (Basel) Ano de publicação: 2022 Tipo de documento: Article País de afiliação: China
Texto completo
Imprimir
XML
PubMed Links
Buscar no Google

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Idioma: En Revista: Micromachines (Basel) Ano de publicação: 2022 Tipo de documento: Article País de afiliação: China