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Development of the Measurement of Lateral Electron Density (MOLE) Probe Applicable to Low-Pressure Plasma Diagnostics.
Kim, Si-Jun; Lee, Sang-Ho; You, Ye-Bin; Lee, Young-Seok; Seong, In-Ho; Cho, Chul-Hee; Lee, Jang-Jae; You, Shin-Jae.
Afiliação
  • Kim SJ; Applied Physics Lab for PLasma Engineering (APPLE), Department of Physics, Chungnam National University, Daejeon 34134, South Korea.
  • Lee SH; Applied Physics Lab for PLasma Engineering (APPLE), Department of Physics, Chungnam National University, Daejeon 34134, South Korea.
  • You YB; Department of Plasma Engineering, Korea Institute of Machinery and Materials (KIMM), Daejeon 34104, South Korea.
  • Lee YS; Applied Physics Lab for PLasma Engineering (APPLE), Department of Physics, Chungnam National University, Daejeon 34134, South Korea.
  • Seong IH; Applied Physics Lab for PLasma Engineering (APPLE), Department of Physics, Chungnam National University, Daejeon 34134, South Korea.
  • Cho CH; Applied Physics Lab for PLasma Engineering (APPLE), Department of Physics, Chungnam National University, Daejeon 34134, South Korea.
  • Lee JJ; Applied Physics Lab for PLasma Engineering (APPLE), Department of Physics, Chungnam National University, Daejeon 34134, South Korea.
  • You SJ; Samsung Electronics, Hwaseong-si 18448, South Korea.
Sensors (Basel) ; 22(15)2022 Jul 22.
Article em En | MEDLINE | ID: mdl-35897990
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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Assunto principal: Elétrons / Micro-Ondas Tipo de estudo: Diagnostic_studies Idioma: En Revista: Sensors (Basel) Ano de publicação: 2022 Tipo de documento: Article País de afiliação: Coréia do Sul
Texto completo
Imprimir
XML
PubMed Links
Buscar no Google

Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Assunto principal: Elétrons / Micro-Ondas Tipo de estudo: Diagnostic_studies Idioma: En Revista: Sensors (Basel) Ano de publicação: 2022 Tipo de documento: Article País de afiliação: Coréia do Sul