Millimeter-scale active area superconducting microstrip single-photon detector fabricated by ultraviolet photolithography.
Opt Express
; 31(10): 16348-16360, 2023 May 08.
Article
em En
| MEDLINE
| ID: mdl-37157715
The effective and convenient detection of single photons via advanced detectors with a large active area is becoming significant for quantum and classical applications. This work demonstrates the fabrication of a superconducting microstrip single-photon detector (SMSPD) with a millimeter-scale active area via the use of ultraviolet (UV) photolithography. The performances of NbN SMSPDs with different active areas and strip widths are characterized. SMSPDs fabricated by UV photolithography and electron beam lithography with small active areas are also compared from the aspects of the switching current density and line edge roughness. Furthermore, an SMSPD with an active area of 1 mm × 1 mm is obtained via UV photolithography, and during operation at 0.85â
K, it exhibits near-saturated internal detection efficiency at wavelengths up to 800â
nm. At a wavelength of 1550â
nm, the detector exhibits a system detection efficiency of â¼5% (7%) and a timing jitter of 102 (144) ps, when illuminated with a light spot of â¼18 (600) µm in diameter, respectively.
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MEDLINE
Idioma:
En
Revista:
Opt Express
Assunto da revista:
OFTALMOLOGIA
Ano de publicação:
2023
Tipo de documento:
Article