Diagnosing Time-Varying Harmonics in Low-k Oxide Thin Film (SiOF) Deposition by Using HDP CVD.

Park, Yonggyun; Liu, Pengzhan; Lee, Seunghwan; Cho, Jinill; Joo, Eric; Kim, Hyeong-U; Kim, Taesung

Park, Yonggyun; Liu, Pengzhan; Lee, Seunghwan; Cho, Jinill; Joo, Eric; Kim, Hyeong-U; Kim, Taesung.

Afiliação

Park Y; School of Mechanical Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea.
Liu P; School of Mechanical Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea.
Lee S; School of Mechanical Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea.
Cho J; School of Mechanical Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea.
Joo E; ComdelKorea, Ltd., 120 Heungdeokjungang-ro, Giheung-gu, Yongin 16950, Republic of Korea.
Kim HU; Department of Plasma Engineering, Korea Institute of Machinery and Materials (KIMM), Daejeon 34103, Republic of Korea.
Kim T; School of Mechanical Engineering, Sungkyunkwan University, Suwon 16419, Republic of Korea.

Sensors (Basel) ; 23(12)2023 Jun 14.

Article em En | MEDLINE | ID: mdl-37420730

Assuntos

Doenças Cardiovasculares; Óxidos; Humanos; Gases; Oxigênio; Dióxido de Silício

Palavras-chave

dual-capacitor-sheath; harmonics; nonlinear characteristic; plasma diagnosis; time-varying

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Texto completo: 1 Coleções: 01-internacional Base de dados: MEDLINE Assunto principal: Óxidos / Doenças Cardiovasculares Tipo de estudo: Diagnostic_studies / Prognostic_studies Limite: Humans Idioma: En Revista: Sensors (Basel) Ano de publicação: 2023 Tipo de documento: Article

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