Fabrication and characterization of a two-dimensional individually addressable electrowetting microlens array: erratum.

The authors present an erratum to update the Acknowledgements section in their published article, ["Fabrication and characterization of a two-dimensional individually addressable electrowetting microlens array," Opt. Express31, 30550 (2023)10.1364/OE.497992].

Fabrication and characterization of a two-dimensional individually addressable electrowetting microlens array.

We demonstrate a two-dimensional, individually tunable electrowetting microlens array fabricated using standard microfabrication techniques. Each lens in our array has a large range of focal tunability from -1.7 mm to -∞ in the diverging regime, which we verify experimentally from 0 to 75 V for a device coated in Parylene C. Additionally, each lens can be actuated to within 1% of their steady-state value within 1.5 ms. To justify the use of our device in a phase-sensitive optical system, we measure the wavefront of a beam passing through the center of a single lens in our device over the actuation range and show that these devices have a surface quality comparable to static microlens arrays. The large range of tunability, fast response time, and excellent surface quality of these devices open the door to potential applications in compact optical imaging systems, transmissive wavefront shaping, and beam steering.

MicroLED light source for optical sectioning structured illumination microscopy.

Optical sectioning structured illumination microscopy (OS-SIM) provides optical sectioning capability in wide-field microscopy. The required illumination patterns have traditionally been generated using spatial light modulators (SLM), laser interference patterns, or digital micromirror devices (DMDs) which are too complex to implement in miniscope systems. MicroLEDs have emerged as an alternative light source for patterned illumination due to their extreme brightness capability and small emitter sizes. This paper presents a directly addressable striped microLED microdisplay with 100 rows on a flexible cable (70 cm long) for use as an OS-SIM light source in a benchtop setup. The overall design of the microdisplay is described in detail with luminance-current-voltage characterization. OS-SIM implementation with a benchtop setup shows the optical sectioning capability of the system by imaging within a 500 µm thick fixed brain slice from a transgenic mouse where oligodendrocytes are labeled with a green fluorescent protein (GFP). Results show improved contrast in reconstructed optically sectioned images of 86.92% (OS-SIM) compared with 44.31% (pseudo-widefield). MicroLED based OS-SIM therefore offers a new capability for deep tissue widefield imaging.

Spectrally tunable liquid resonator based on electrowetting.

We present a tunable on-chip liquid resonator in conjunction with a tapered fiber coupling scheme. The resonator consists of a glycerol droplet submerged within an immiscible liquid bath, which mitigates the effects of environmental fluctuations. The platform is fabricated using standard semiconductor techniques, which enable the future integration of photonic components for an on-chip liquid resonator device. The liquid resonator maintains its high Q-factor on chip (105) due to surface tension forming an atomically smooth liquid-liquid interface. Higher Q-factor resonance modes experienced linewidth broadening due to the random excitation of thermal capillary vibrations. Spectral tuning is demonstrated using the electrowetting effect, increasing the surface's wettability and an expansion in the droplet diameter. A maximum spectral tuning of 1.44 nm ± 5 pm is observed by applying 35 V. The tuning range is twice the free spectral range (FSR) of 0.679 nm measured at a pumping wavelength range of 770-775 nm. A 2D axisymmetric finite-element simulation shows resonance modes in good agreement with experimentally measured spectra and with predicted tuning speeds of 20 nm/s.

High extinction ratio, low insertion loss, optical switch based on an electrowetting prism.

An optical switch based on an electrowetting prism coupled to a multimode fiber has demonstrated a large extinction ratio with speeds up to 300 Hz. Electrowetting prisms provide a transmissive, low power, and compact alternative to conventional free-space optical switches, with no moving parts. The electrowetting prism performs beam steering of ±3° with an extinction ratio of 47 dB between the ON and OFF states and has been experimentally demonstrated at scanning frequencies of 100-300 Hz. The optical design is modeled in Zemax to account for secondary rays created at each surface interface (without scattering). Simulations predict 50 dB of extinction, in good agreement with experiment.

Calibration and characteristics of an electrowetting laser scanner.

We present a calibration method to correct for fabrication variations and optical misalignment in a two-dimensional electrowetting scanner. These scanners are an attractive option due to being transmissive, nonmechanical, having a large scan angle (±13.7°), and low power consumption (µW). Fabrication imperfections lead to non-uniform deposition of the dielectric or hydrophobic layer which results in actuation inconsistency of each electrode. To demonstrate our calibration method, we scan a 5 × 5 grid target using a four-electrode electrowetting prism and observe a pincushion type optical distortion in the imaging plane. Zemax optical simulations verify that the symmetric distortion is due to the projection of a radial scanning surface onto a flat imaging plane, while in experiment we observe asymmetrical distortion due to optical misalignment and fabrication imperfections. By adjusting the actuation voltages through an iterative Delaunay triangulation interpolation method, the distortion is corrected and saw an improvement in the mean error across 25 grid points from 43 µm (0.117°) to 10 µm (0.027°).

Lidar system with nonmechanical electrowetting-based wide-angle beam steering.

A light detection and ranging (lidar) system with ±90° of steering based on an adaptive electrowetting-based prism for nonmechanical beam steering has been demonstrated. Electrowetting-based prisms provide a transmissive, low power, and compact alternative to conventional adaptive optics as a nonmechanical beam scanner. The electrowetting prism has a steering range of ±7.8°. We demonstrate a method to amplify the scan angle to ±90° and perform a one-dimensional scan in a lidar system.

Liquid Combination with High Refractive Index Contrast and Fast Scanning Speeds for Electrowetting Adaptive Optics.

Electrowetting adaptive optical devices are versatile, with applications ranging from microscopy to remote sensing. The choice of liquids in these devices governs its tuning range, temporal response, and wavelength of operation. We characterized a liquid system, consisting of 1-phenyl-1-cyclohexene and deionized water, using both lens and prism devices. The liquids have a large contact angle tuning range, from 173 to 60°. Measured maximum scanning angle was realized at ±13.7° in a two-electrode prism, with simulation predictions of ±18.2°. The liquid's switching time to reach 90° contact angle from rest, in a 4 mm diameter device, was measured at 100 ms. Steady-state scanning with a two-electrode prism showed linear and consistent scan angles of ±4.8° for a 20 V differential between the two electrodes, whereas beam scanning using the liquid system achieved ±1.74° at 500 Hz for a voltage differential of 80 V.

Numerical analysis of wavefront aberration correction using multielectrode electrowetting-based devices.

We present numerical simulations of multielectrode electrowetting devices used in a novel optical design to correct wavefront aberration. Our optical system consists of two multielectrode devices, preceded by a single fixed lens. The multielectrode elements function as adaptive optical devices that can be used to correct aberrations inherent in many imaging setups, biological samples, and the atmosphere. We are able to accurately simulate the liquid-liquid interface shape using computational fluid dynamics. Ray tracing analysis of these surfaces shows clear evidence of aberration correction. To demonstrate the strength of our design, we studied three different input aberrations mixtures that include astigmatism, coma, trefoil, and additional higher order aberration terms, with amplitudes as large as one wave at 633 nm.

Enhanced Response Time of Electrowetting Lenses with Shaped Input Voltage Functions.

Adaptive optical lenses based on the electrowetting principle are being rapidly implemented in many applications, such as microscopy, remote sensing, displays, and optical communication. To characterize the response of these electrowetting lenses, the dependence upon direct current (DC) driving voltage functions was investigated in a low-viscosity liquid system. Cylindrical lenses with inner diameters of 2.45 and 3.95 mm were used to characterize the dynamic behavior of the liquids under DC voltage electrowetting actuation. With the increase of the rise time of the input exponential driving voltage, the originally underdamped system response can be damped, enabling a smooth response from the lens. We experimentally determined the optimal rise times for the fastest response from the lenses. We have also performed numerical simulations of the lens actuation with input exponential driving voltage to understand the variation in the dynamics of the liquid-liquid interface with various input rise times. We further enhanced the response time of the devices by shaping the input voltage function with multiple exponential rise times. For the 3.95 mm inner diameter lens, we achieved a response time improvement of 29% when compared to the fastest response obtained using single-exponential driving voltage. The technique shows great promise for applications that require fast response times.

Large extinction ratio optical electrowetting shutter.

A large extinction ratio optical shutter has been demonstrated using electrowetting liquids. The device is based on switching between a liquid-liquid interface curvature that produces total internal reflection and one that does not. The interface radius of curvature can be tuned continuously from 9 mm at 0 V to -45 mm at 26 V. Extinction ratios from 55.8 to 66.5 dB were measured. The device shows promise for ultracold chip-scale atomic clocks.

Adaptive electrowetting lens-prism element.

An adaptive electrowetting-based element with focusing and steering capability has been demonstrated in a monolithic design. Curvature and tip-tilt variation have been demonstrated using low voltages. A steering range of up to 4.3° and lens tuning of 18 diopters have been measured at 30 V DC and 21 V DC, respectively.

Miniaturized fiber-coupled confocal fluorescence microscope with an electrowetting variable focus lens using no moving parts.

We report a miniature, lightweight fiber-coupled confocal fluorescence microscope that incorporates an electrowetting variable focus lens to provide axial scanning for full three-dimensional (3D) imaging. Lateral scanning is accomplished by coupling our device to a laser-scanning confocal microscope through a coherent imaging fiber-bundle. The optical components of the device are combined in a custom 3D-printed adapter with an assembled weight of <2 g that can be mounted onto the head of a mouse. Confocal sectioning provides an axial resolution of ∼12 µm and an axial scan range of ∼80 µm. The lateral field-of-view is 300 µm, and the lateral resolution is 1.8 µm. We determined these parameters by imaging fixed sections of mouse neuronal tissue labeled with green fluorescent protein (GFP) and fluorescent bead samples in agarose gel. To demonstrate viability for imaging intact tissue, we resolved multiple optical sections of ex vivo mouse olfactory nerve fibers expressing yellow fluorescent protein (YFP).

Focus-tunable low-power electrowetting lenses with thin parylene films.

Electrowetting lenses with record low power consumption (microwatts) have been demonstrated using high-quality parylene AF-4 dielectric layers and large dodecyl sulfate ions. Water and propylene glycol are interchanged as the polar liquid to enable diverging and converging lens operation achievable with the application of 15 V. The optical quality of the lenses is comparable to conventional microlenses and the tuning exhibits very little (<0.5°) contact angle hysteresis.

GaN nanowire coated with atomic layer deposition of tungsten: a probe for near-field scanning microwave microscopy.

GaN nanowires were coated with tungsten by means of atomic layer deposition. These structures were then adapted as probe tips for near-field scanning microwave microscopy. These probes displayed a capacitive resolution of ~0.03 fF, which surpasses that of a commercial Pt tip. Upon imaging of MoS2 sheets with both the Pt and GaN nanowire tips, we found that the nanowire tips were comparatively immune to surface contamination and far more durable than their Pt counterparts.

On-chip optical interconnects made with gallium nitride nanowires.

In this Letter we report on the fabrication, device characteristics, and optical coupling of a two-nanowire device comprising GaN nanowires with light-emitting and photoconductive capabilities. Axial p-n junction GaN nanowires were grown by molecular beam epitaxy, transferred to a non-native substrate, and selectively contacted to form discrete optical source or detector nanowire components. The optical coupling demonstrated for this device may provide new opportunities for integration of optical interconnects between on-chip electrical subsystems.

Building Semipermeable Films One Monomer at a Time: Structural Advantages via Molecular Layer Deposition vs Interfacial Polymerization.

Molecular layer deposition (MLD) provides the opportunity to perform condensation polymerization one vaporized monomer at a time for the creation of precise, selective nanofilms for desalination membranes. Here, we compare the structure, chemistry, and morphology of two types of commercial interfacial polymerzation (IP) membranes with lab-made MLD films. M-phenylenediamine (MPD) and trimesoyl chloride (TMC) produced a cross-linked, aromatic polyamide often used in reverse osmosis membranes at MLD growth rates of 2.9 Å/cycle at 115 °C. Likewise, piperazine (PIP) and TMC formed polypiperazine amide, a common selective layer in nanofiltration membranes, with MLD growth rates of 1.5 Å/cycle at 115 °C. Ellipsometry and X-ray reflectivity results suggest that the surface of the MLD films is comprised of polymer segments roughly two monomers in length, which are connected at one end to the cross-linked bulk layer. As a result of this structure as well as the triple-functionality of TMC, MPD-TMC had a temperature window of stable growth rate from 115 to 150 °C, which is unlike any non-cross-linked MLD chemistries reported in the literature. Compared to IP films, corresponding MLD films were denser and morphologically conformal, which suggests a reduction in void volumes; this explains the high degree of salt rejection and reduced flux previously observed for exceptionally thin MPD-TMC MLD membranes. Using X-ray photoelectron spectroscopy and infrared spectroscopy, MLD PIP-TMC films evidenced a completely cross-linked internal structure, which lacked amine and carboxyl groups, pointing to a hydrophobic bulk structure, ideal for optimized water flux. Grazing-incidence wide-angle X-ray scattering showed broad features in each polyamide with d-spacings of 5.0 Å in PIP-TMC compared to that of 3.8 Å in MPD-TMC. While MLD and IP films were structurally identical to PIP-TMC, MPD-TMC IP films had a structure that may have been altered by post-treatment compared to MLD films. These results provide foundational insights into the MLD process, structure-performance relationships, and membrane fabrication.

Tunable liquid lens for three-photon excitation microscopy.

We demonstrate a novel electrowetting liquid combination using a room temperature ionic liquid (RTIL) and a nonpolar liquid, 1-phenyl-1-cyclohexene (PCH) suitable for focus-tunable 3-photon microscopy. We show that both liquids have over 90% transmission at 1300 nm over a 1.1 mm pathlength and an index of refraction contrast of 0.123. A lens using these liquids can be tuned from a contact angle of 133 to 48° with applied voltages of 0 and 60 V, respectively. Finally, a three-photon imaging system including an RTIL electrowetting lens was used to image a mouse brain slice. Axial scans taken with an electrowetting lens show excellent agreement with images acquired using a mechanically scanned objective.

Electrowetting lenses for compensating phase and curvature distortion in arrayed laser systems.

We have demonstrated a one-dimensional array of individually addressable electrowetting tunable liquid lenses that compensate for more than one wave of phase distortion across a wavefront. We report a scheme for piston control using tunable liquid lens arrays in volume-bound cavities that alter the optical path length without affecting the wavefront curvature. Liquid lens arrays with separately tunable focus or phase control hold promise for laser communication systems and adaptive optics.

Adaptive aberration correction using an electrowetting array.

We demonstrate a method that permits wavefront aberration correction using an array of electrowetting prisms. A fixed high fill factor microlens array followed by a lower fill factor adaptive electrowetting prism array is used to correct wavefront aberration. The design and simulation of such aberration correction mechanism is described. Our results show significant improvement to the Strehl ratio by using our aberration correction scheme which results in diffraction limited performance. Compactness and effectiveness of our design can be implemented in many applications that require aberration correction, such as microscopy and consumer electronics.