Chip-level mass detection for micro-LED displays based on regression analysis and deep learning.

Though micro-light-emitting diode (micro-LED) displays are regarded as the next-generation emerging display technology, challenges such as defects in LED's light output power and radiation patterns are critical to the commercialization success. Here we propose an electroluminescence mass detection method to examine the light output quality from the on-wafer LED arrays before they are transferred to the display substrate. The mass detection method consists of two stages. In the first stage, the luminescent image is captured by a camera by mounting an ITO (indium-tin oxide) transparent conducting glass on the LED wafer. Due to the resistance of the ITO contact pads and on-wafer n-type electrodes, we develop a calibration method based on the circuit model to predict the current flow on each LED. The light output power of each device is thus calibrated back by multi-variable regression analysis. The analysis results in an average variation as low as 6.89% for devices predicted from luminescent image capturing and actual optical power measurement. We also examine the defective or non-uniform micro-LED radiation profiles by constructing a 2-D convolutional neural network (CNN) model. The optimized model is determined among three different approaches. The CNN model can recognize 99.45% functioning LEDs, and show a precision of 96.29% for correctly predicting good devices.

Luminescence efficiency improvement of small-size micro light-emitting diodes by a digital etching technology.

The decrease of light output efficiency with the reduction of LED (light-emitting diode) die size is one of the challenges of micro-LED displays. Here we propose a digital etching technology that employs multi-step etching and treatment to mitigate sidewall defects exposed after mesa dry etching. In this study, by two-step etching and N2 treatment, the electrical properties of the diodes show an increase of forward current and a decrease in reverse leakage due to suppressed sidewall defects. An increase of light output power by 92.6% is observed for 10 × 10-µm2 mesa size with digital etching, as compared with that with only one step etching and no treatment. We also demonstrated only 1.1% decrease in output power density for a 10 × 10-µm2 LED as compared with a 100 × 100-µm2 device without performing digital etching.

Beyond GHz optical frequency up-converted modulation of LEDs with integrated acousto-optic transducer.

Traditional visible light communication (VLC) via light-emitting diodes (LEDs) employs the on-off keying (OOK) modulation scheme. Even though optical frequency modulation has many advantages, it is hardly used for LED VLC because a high carrier frequency cannot be applied to the LED cavity due to the resistance-capacitance limit. Here, by monolithically integrating an LED with an integrated digital transducer, we experimentally demonstrate the intermixing of gigahertz surface acoustic waves and electrical data signals in the LED cavity at room temperature. An optical transmitter was realized by in situ frequency up-conversion of the data signals from an LED, which has the advantages of improving transmission performance by up-shifting the data spectrum away from low-frequency noise. Our proposed integrated acousto-optic transducer opens a new developing scheme on the frequency up-mixed data encoding of an LED beyond its inherent modulation bandwidth for future VLC.

Surface acoustic wave actuated plasmonic signal amplification in a plasmonic waveguide.

Enhancement of nanoscale confinement in the subwavelength waveguide is a concern for advancing future photonic interconnects. Rigorous innovation of plasmonic waveguide-based structure is crucial in designing a reliable on-chip optical waveguide beyond the diffraction limit. Despite several structural modifications and architectural improvements, the plasmonic waveguide technology is far from reaching its maximum potential for mass-scale applications due to persistence issues such as insufficient confined energy and short propagation length. This work proposes a new method to amplify the propagating plasmons through an external on-chip surface acoustic signal. The gold-silicon dioxide (Au-SiO2) interface, over Lithium Niobate (LN) substrate, is used to excite propagating surface plasmons. The voltage-varying surface acoustic wave (SAW) can tune the plasmonic confinement to a desired signal energy level, enhancing and modulating the plasmonic intensity. From our experimental results, we can increase the plasmonic intensity gain of 1.08 dB by providing an external excitation in the form of SAW at a peak-to-peak potential swing of 3 V, utilizing a single chip.

A point-of-care electrochemical biosensor for the rapid and sensitive detection of biomarkers in murine models with LPS-induced sepsis.

Sepsis is a life-threatening condition, which is irreversible if diagnosis and intervention are delayed. The response of the immune cells towards an infection triggers widespread inflammation through the production of cytokines, which may result in multiple organ dysfunction and eventual death. Conventional detection techniques fail to provide a rapid diagnosis because of their limited sensitivity and tedious protocol. This study proposes a point-of-care (POC) electrochemical biosensor that overcomes the limitations of current biosensing technologies in the clinical setting by its integration with electrokinetics, enhancing the sensitivity to picogram level compared with the nanogram limit of current diagnostic technologies. This biosensor promotes the use of a microelectrode strip to address the limitations of conventional photolithographic fabrication methods. Tumor necrosis factor-alpha (TNF-α), interleukin-6 (IL-6), and microRNA-155 (miR-155) were monitored in a lipopolysaccharide (LPS)-induced septic mouse model. The optimum target hybridization time in a high conductivity medium was observed to be 60 s leading to the completion of the whole operation within 5 min compared with the 4-h detection time of the traditional enzyme-linked immunosorbent assay (ELISA). The limit of detection (LOD) was calculated to be 0.84, 0.18, and 0.0014 pg mL-1, respectively. This novel sensor may have potential for the early diagnosis of sepsis in the clinical setting.

Surface plasmon-enhanced photoluminescence of DCJTB by using silver nanoparticle arrays.

It is demonstrated that photoluminescence of DCJTB can be enhanced by surface plasmons occurred in silver nanoparticle arrays on glass substrates fabricated by using nanosphere lithography (NSL) combined with reactive ion etching (RIE). By changing the size of the seed polystyrene nanosphere with fixed thickness of SiO(2) film as a buffer layer between silver nanoparticles and fluorescent dye, we systematically studied the interaction between surface plasmons in Ag nanostructures and fluorescent dye by measuring the photoluminescence and time-resolved photoluminescence (TRPL) of the samples. As compared with pure DCJTB, it is observed that PL enhancement as high as 9.4 times and life time shortening from 0.966 ns shortened to 0.63 ns can be achieved with polystyrene nanosphere 430 nm in diameter. The physical origin due to plasmonic excitation has been clarified from 3D finite element simulations, as well as the assistance of UV-visible reflectance spectrum.

Far-field self-focusing and -defocusing radiation behaviors of the electroluminescent light sources due to negative refraction.

In recent years, researchers have demonstrated negative refraction theoretically and experimentally by pumping optical power into photonic crystal (PhC) or waveguide structures. The concept of negative refraction can be used to create a perfect lens that focuses an object smaller than the wavelength. By inserting two-dimensional PhCs into the peripheral of a semiconductor light emitting structure, this study presents an electroluminescent device with negative refraction in the visible wavelength range. This approach produces polarization dependent collimation behavior in far-field radiation patterns. The modal dispersion of negative refraction results in strong group velocity modulation, and self-focusing and -defocusing behaviors are apparent from light extraction. This study further verifies experimental results by using theoretic calculations based on equifrequency contours.

Monitoring levodopa oxidation and reduction reactions using surface plasmon resonance on a nanohole array electrode.

The traditional method of monitoring the oxidation and reduction of biomedical materials usually relies on electrochemical (EC) measurement techniques. Here, we demonstrate a surface plasmon resonance (SPR) method to monitor the oxidation process. Using levodopa L-dopa as the target analyte, a nanohole sensing plate is embedded in the EC electrode to enhance the oxidation signal and generate SPR. Cyclic voltammetry (CV) measurement was first conducted to understand the baseline of EC response of L-Dopa. Then, the redox reactions were simultaneously monitored through SPR measurements during the CV voltage scan. The results showed that the limit of detection using traditional CV reached 1.47 µM while using EC-SPR, the limit of detection improved to 1.23 µM. Most importantly, we found a strong correlation between CV current profiles and the SPR reflection spectra. Our results facilitate detecting electrochemical reactions using an optical probing method.

GaN Vertical Transistors with Staircase Channels for High-Voltage Applications.

In this study, we propose and simulate the design of a non-regrowth staircase channel GaN vertical trench transistor, demonstrating an exceptional threshold and breakdown characteristic for high power and high frequency applications. The unique staircase design provides a variable capacitance through the gate-dielectric-semiconductor interface, which results in a high breakdown voltage of 1.52 kV and maintains a channel on-resistance of 2.61 mΩ∙cm2. Because of the variable length and doping profile in the channel region, this model offers greater flexibility to meet a wide range of device application requirements.

Effect of radiative and nonradiative energy transfer processes of light-emitting diodes combined with quantum dots for visible light communication.

Though light-emitting diodes (LEDs) combined with various color conversion techniques have been widely explored for VLC (visible light communication), E-O (electro-optical) frequency responses of devices with quantum dots (QDs) embedded within the nanoholes have rarely been addressed. Here we propose LEDs with embedded photonic crystal (PhC) nanohole patterns and green light QDs for studying small-signal E-O frequency bandwidths and large signal on-off keying E-O responses. We observe that the E-O modulation quality of PhC LEDs with QDs is better than a conventional LED with QDs when the overall blue mixed with green light output signal is considered. However, the optical response of only QD converted green light shows a contradictory result. The slower E-O conversion response is attributed to multi-path green light generation from both radiative and nonradiative energy transfer processes for QDs coated on the PhC LEDs.

Voltage-modulated surface plasmon resonance biosensors integrated with gold nanohole arrays.

Surface plasmon resonance (SPR) has emerged as one of the most efficient and attractive techniques for optical sensors in biological applications. The traditional approach of an EC (electrochemical)-SPR biosensor to generate SPR is by adopting a prism underneath the sensing substrate, and an angular scan is performed to characterize the reflectivity of target analytes. In this paper, we designed and investigated a novel optical biosensor based on a hybrid plasmonic and electrochemical phenomenon. The SPR was generated from a thin layer of gold nanohole array on a glass substrate. Using C-Reactive Protein (CRP) as the target analyte, we tested our device for different concentrations and observed the optical response under various voltage bias conditions. We observed that SPR response is concentration-dependent and can be modulated by varying DC voltages or AC bias frequencies. For CRP concentrations ranging from 1 to 1000 µg/mL, at the applied voltage of -600 mV, we obtained a limit of detection for this device of 16.5 ng/mL at the resonance peak wavelength of 690 nm. The phenomenon is due to spatial re-distribution of electron concentration at the metal-solution interface. The results suggest that CRP concentration can be determined from the SPR peak wavelength shift by scanning the voltages. The proposed new sensor structure is permissible for various future optoelectronic integration for plasmonic and electrochemical sensing.

Tumor detection strategy using ZnO light-emitting nanoprobes.

Traditional methods of detecting cancer cells, such as fluorescence, have their limits and can hardly be used for identification during tumor resection. Here we report an alternative tumor detection technology using ZnO nanorods bonded to antibodies as cancer cell probes. Our experiment shows that antibodies toward epidermal growth factor receptor (EGFR) can be connected to ZnO nanorods and to EGFR receptors of SCC (squamous cell carcinoma). The cancer cell can be recognized by the naked eye or an optical microscope with the help of purple light emission from ZnO/EGFR antibody probes. On the other hand, for cells with less EGFR expression, in our case Hs68, no purple light was observed as the probes were washed off. From the photoluminescent spectra, the peak intensity ratio between the purple light (from ZnO at the wavelength 377 nm) and the green band (from the autofluorescence of cells) is much higher with the presence in SCC, as compared with Hs68. The ZnO/EGFR antibody probes have the potential to be applied to surgery for real-time tumor cell identification. The cancer cells will be excised with the help of purple light emission.

Investigation of the strain induced optical transition energy shift of the GaN nanorod light emitting diode arrays.

Strain in the semiconductor light emitting layers has profound effect on the energy band structure and the optical properties of the light emitting diodes (LEDs). Here, we report the fabrication and characterization of GaN nanorod LED arrays. We found that the choice of nanorod passivation materials results in the variation of strain in the InGaN/GaN quantum wells, and thus the corresponding change of light emission properties. The results were further investigated by performing Raman measurement to understand the strain of nanorods with different passivation materials and by calculating the optical transition energy of the devices under the influence of strain-induced deformation potential and the piezoelectric polarization field.

GaN-based LEDs surrounded with a two-dimensional nanohole photonic crystal structure for effective laterally guided mode coupling.

Traditional implementation of photonic crystals (PhCs) on LED light emission surfaces results in weak coupling of light with the PhCs. Here we introduce a GaN-based LED surrounded with a nanohole PhC structure along the mesa edges. The laterally guided modes in the epi-structure can be effectively coupled with the two-dimensional periodic structure. The proposed structure results in the improvement of LED light extraction and provides flexibility of radiation directionality control.

Polarization dependent solar cell conversion efficiency at oblique incident angles and the corresponding improvement using surface nanoparticle coating.

Despite tremendous efforts on improving the solar cell conversion efficiency at normal incidence, improvement at oblique angles has not been widely addressed, not to mention the corresponding light absorption behaviors at different polarizations. Here we report the characterization of the solar cell conversion efficiency and the spectra of photoresponsivity at various tilted angles. The results show that TM (transverse magnetic) polarized light possesses higher photoresponsivity than TE (transverse electric) polarized light and the difference becomes larger with the incidence angle. To address the issue, a monolayer of silica nanoparticles on the solar cell surface was employed to improve the light absorption. Even though both TE and TM waves show a decrease in the surface reflectivity with the presence of nanoparticles, the interaction between the silica particles and the TE wave is more significant. The improvement of the conversion efficiency for obliquely incident light is explained from the refractive index difference of the nanoparticles for the TE and TM polarizations.

Investigation of low-temperature electroluminescence of InGaN/GaN based nanorod light emitting arrays.

For InGaN/GaN based nanorod devices using a top-down etching process, the optical output power is affected by non-radiative recombination due to sidewall defects (which decrease light output efficiency) and the mitigated quantum confined Stark effect (QCSE) due to strain relaxation (which increases internal quantum efficiency). Therefore, the exploration of low-temperature optical behaviors of nanorod light emitting diodes (LEDs) will help identify the correlation between these two factors. In this work, low-temperature electroluminescent (EL) spectra of InGaN/GaN nanorod arrays were explored and compared with those of planar LEDs. The nanorod LED exhibits a much higher optical output percentage increase when the temperature decreases. The increase is mainly attributed to the increased carriers in the quantum wells for radiative recombination. Also, due to a better spatial overlap of electrons and holes in the quantum wells, the increased number of carriers can be more efficiently recombined in the nanorod device. Next, while the nanorod array shows nearly constant peak energy in the EL spectra at various injection currents at the temperature of 300 K, a blue shift has been observed at 190 K. The results suggest that with less non-radiative recombination and thus more carriers in the quantum wells, carrier screening and band filling still prevail in the partially strain relaxed nanorods. Moreover, when the temperature drops to 77 K, the blue shift of both nanorod and planar devices disappears and the optical output power decreases since there are fewer carriers in the quantum wells for radiative recombination.

Observation of 990-MHz Optical Oscillation From Light Emitters Excited by High-Order Harmonics of Surface Acoustic Waves.

Optomechanical properties have been widely explored on the interactions between phonon, photon, and electrons. The applications range from acoustic filters for mobile handsets to quantum information science./However, up to date, the interaction between harmonic modes of surface acoustic waves (SAWs) and photons has not been studied in detail. Here, we develop radio frequency (RF) - modulated light emitters driven by the coupling between electrical and acoustic signals at room temperature. The light emitter demonstrates a 990-MHz oscillation behavior which cannot be solely achieved by electrical driving due to resistance-capacitance (RC) limit. Instead, the result is attributed to the excitation by the harmonics of SAWs in the light emitter. The ~gigahertz light oscillation enables a new architecture for information processing. In this work, we also demonstrate the coupling between acoustooptical and electrooptical interactions by simultaneously applying 990-MHz acoustic signals and 20-MHz modulated electrical inputs.

Observation of Acoustic Charge Transport in GaN-Based Quantum Well Structures Under Surface Acoustic Wave Excitations.

Though the acoustoelectric and acoustooptic interactions have been widely studied on III-V semiconductors, most studies were conducted at low temperature to avoid the influence of lattice scattering. Here, we demonstrate larger-than-1-GHz optical oscillation and acoustic charge transport at room temperature from a nitride-based LED (light-emitting diode) by acoustic wave excitation. The optical oscillation is generated by the harmonics of acoustic waves, while the acoustic transport of carriers was observed from the LED light output at different acoustic excitation frequencies. Furthermore, with the change of bias voltage, the frequency response of light output varies correspondingly due to the thermal disturbance that affects the lattice vibration and acoustic wave propagation. The results also suggest that we are able to achieve a tunable optical resonant frequency by varying bias voltages without changing the LED structure.

Analysis of the Biochemical Reaction Status by Real-Time Monitoring Molecular Diffusion Behaviors Using a Transistor Biosensor Integrated with a Microfluidic Channel.

Traditional methods of monitoring biochemical reactions measure certain detectable reagents or products while assuming that the undetectable species follow the stoichiometry of the reactions. Here, based upon the metal-oxide thin-film transistor (TFT) biosensor, we develop a real-time molecular diffusion model to benchmark the concentration of the reagents and products. Using the nicotinamide adenine dinucleotide (NADH)-oxaloacetic acid with the enzyme of malate dehydrogenase as an example, mixtures of different reagent concentrations were characterized to extract the ratio of remaining concentrations between NAD+ and NADH. We can thus obtain the apparent equilibrium constant of the reaction, (8.06 ± 0.61) × 104. Because the whole analysis was conducted using a TFT sensor fabricated using a semiconductor process, our approach has the advantages of exploring biochemical reaction kinetics in a massively parallel manner.

High performance InGaN/GaN nanorod light emitting diode arrays fabricated by nanosphere lithography and chemical mechanical polishing processes.

We fabricated InGaN/GaN nanorod light emitting diode (LED) arrays using nanosphere lithography for nanorod formation, PECVD (plasma enhanced chemical vapor deposition) grown SiO(2) layer for sidewall passivation, and chemical mechanical polishing for uniform nanorod contact. The nano-device demonstrates a reverse current 4.77nA at -5V, an ideality factor 7.35, and an optical output intensity 6807mW/cm(2) at the injection current density 32A/cm(2) (20mA). Moreover, the investigation of the droop effect for such a nanorod LED array reveals that junction heating is responsible for the sharp decrease at the low current.