RESUMEN
In the present study, we proposed a new type of autocollimator for high-accuracy angular measurement within a large angle range. The new system comprises a traditional autocollimator and Risley prisms, and it employs the normal tracing method to measure the angle. By rotating the Risley prisms, the outgoing beam of the autocollimator can be deflected close to the normal direction of the reflecting mirror and then reflected back to the system by the mirror along the near normal direction to realize normal tracing. Based on the angle measured by the the autocollimator and the rotation angles of Risley prisms, we can calculate the tilt angle of the mirror. Since the beam returns to the system close to the original path, the angle error caused by aberration, optical component processing defects, nonuniform refractive index, and so on, can be ignored. Due to the normal tracing measurement method, theoretically, the angle error is not affected by the working distance. ZEMAX non-sequential simulation shows that the angle error caused by aberration in the new system can be significantly reduced.
RESUMEN
Scanning deflectometric profilers based on an f-θ system are typical optical tools used to measure mirror profiles at many synchrotron facilities. Unlike these profilers, which are based on a pencil beam, here a secondary light source and a pinhole are used to construct a system that automatically selects a beam that will always pass through the pinhole and propagate along the normal direction of the measured area on the surface under test. By measuring the angle variation of the selected beam, slope variations of the surface under test can be measured. Systematic errors introduced by manufacturing defects or aberrations of an optical element, which greatly degrade the performance of traditional profilers, could be minimized by using the developed method. Simulation values of the proposed method and a conventional method are compared.