High-flexibility and high-accuracy phase delay calibration method for MEMS-based fringe projection systems.

Microelectromechanical system (MEMS) mirror based laser beam scanning (LBS) projectors for fringe projection profilometry (FPP) are becoming increasingly popular attributing to their small size and low cost. However, the initial phase of the scanning MEMS mirror employed in an LBS projector may vary over time, resulting in unstable and distorted fringe patterns. The distorted fringe patterns will largely decrease the accuracy of the three-dimensional (3D) topographic reconstruction. In this paper, an efficient phase delay calibration method based on a unique fringe projection sequence and a corresponding image processing algorithm is proposed. The proposed method can compensate the phase uncertainty and variation with no need to add any extra components. One LBS projector has been constructed using a uniaxial electrostatic MEMS mirror that has a mirror size of 2.5 mm × 2.5 mm and a scanning field of view of 60 ∘ at its resonance of 1523 Hz. 3D reconstruction experiments are conducted to study how the 3D reconstruction results are affected by the phase delay. The standard deviation of a sphere reconstruction is improved from 2.05 mm to 0.20 mm after the positive phase delay deviation of 5 µs is compensated using this new calibration method.

Development of Dual-Frequency PMUT Arrays Based on Thin Ceramic PZT for Endoscopic Photoacoustic Imaging.

This paper presents a dual-frequency piezoelectric micromachined ultrasonic transducer (pMUT) array based on thin ceramic PZT for endoscopic photoacoustic imaging (PAI) applications. With a chip size of 7 × 7 mm2, the pMUT array consists of 256 elements, half of which have a lower resonant frequency of 1.2 MHz and the other half have a higher resonant frequency of 3.4 MHz. Ceramic PZT, with outstanding piezoelectric coefficients, has been successfully thinned down to a thickness of only 4 µ by using wafer bonding and chemical mechanical polishing (CMP) techniques and employed as the piezoelectric layer of the pMUT elements. The diaphragm diameters of the lower-frequency and higher-frequency elements are 220 µm and 120 µm, respectively. The design methodology, multiphysics modeling, fabrication process, and characterization of the pMUTs are presented in detail. The fabricated pMUT array has been fully characterized via electrical, mechanical, and acoustic measurements. The measured maximum responsivities of the lower- and higher- frequency elements reach 110 nm/V and 30 nm/V at their respective resonances. The measured cross-couplings of the lower-frequency elements and higher-frequency elements are about 9% and 5%, respectively. Furthermore, PAI experiments with pencil leads embedded into an agar phantom have been conducted, which clearly shows the advantages of using dual-frequency pMUT arrays to provide comprehensive photoacoustic images with high spatial resolution and large signal-to-noise ratio simultaneously.

A MEMS lens scanner based on serpentine electrothermal bimorph actuators for large axial tuning.

Confocal microscopes and two-photon microscopes are powerful tools for early cancer diagnosis because of their high-resolution 3D imaging capability, but applying them for clinical use in internal organs is hindered by the lack of axially tunable lens modules with small size, high image quality and large tuning range. This paper reports a compact MEMS lens scanner that has the potential to overcome this limitation. The MEMS lens scanner consists of a MEMS microstage and a microlens. The MEMS microstage is based on a unique serpentine inverted-series-connected (ISC) electrothermal bimorph actuator design. The microlens is an aspheric glass lens to ensure optical quality. The MEMS microstage has been fabricated and the lens scanner has been successfully assembled. The entire lens scanner is circular with an outer diameter of 4.4 mm and a clear optical aperture of 1.8 mm. Experiments show that the tunable range reaches over 200 µm at only 10.5 V and the stiffness of the microstage is 6.2 N/m. Depth scan imaging by the MEMS lens scanner has also been demonstrated with a 2.2 µm resolution, only limited by the available resolution target.

Analog-controlled light microshutters based on electrothermal actuation for smart windows.

Smart windows for sunlight control play an important role in modern green buildings. Electrically-controllable light microshutters provide a promising solution for smart windows. However, most of reported microshutters work under on/off binary mode. In this work, an electrothermally actuated microshutter that can achieve analog light control is proposed. The microshutter consists of an array of electrothermal Al/SiO2 bimorph cantilever plates suspended over a through-silicon cavity. The device is fabricated by a combination of surface- and bulk- micromachining processes. Test experiments show that for a single microshutter pixel, the device opening ratio can be tuned continuously from 78.6% (Open state, 0 V) all the way down to nearly 0% (Close state, 8 V) with a small hysteresis. For the entire array of 2 × 5 microshutters, the light transmission ratio varies continuously from 63.3% to 3.6% when the applied voltage is increased from 0 to 7.3 V. Furthermore, the response time, long-term reliability and window-like function of the microshutter are tested.

Real-time Lissajous imaging with a low-voltage 2-axis MEMS scanner based on electrothermal actuation.

Laser scanning based on Micro-Electro-Mechanical Systems (MEMS) scanners has become very attractive for biomedical endoscopic imaging, such as confocal microscopy or Optical Coherence Tomography (OCT). These scanners are required to be fast to achieve real-time image reconstruction while working at low actuation voltage to comply with medical standards. In this context, we report a 2-axis Micro-Electro-Mechanical Systems (MEMS) electrothermal micro-scannercapable of imaging large fields of view at high frame rates, e.g. from 10 to 80 frames per second. For this purpose, Lissajous scan parameters are chosen to provide the optimal image quality within the scanner capabilities and the sampling rate limit, resulting from the limited A-scan rate of typical swept-sources used for OCT. Images of 233 px × 203 px and 53 px × 53 px at 10 fps and 61 fps, respectively, are experimentally obtained and demonstrate the potential of this micro-scannerfor high definition and high frame rate endoscopic Lissajous imaging.

A Ceramic PZT-based PMUT Array for Endoscopic Photoacoustic Imaging.

In this paper, we present the design, fabrication, and characterization of a compact 4 × 4 piezoelectric micromachined ultrasonic transducer (pMUT) array and its application to photoacoustic imaging. The uniqueness of this pMUT array is the integration of a 4 µm-thick ceramic PZT, having significantly higher piezoelectric coefficient and lower stress than sol-gel or sputtered PZT. The fabricated pMUT array has a small chip size of only 1.8 × 1.6 mm2 with each pMUT element having a diameter of 210 µm. The fabricated device was characterized with electrical impedance measurement and acoustic sensing test. Photoacoustic imaging has also been successfully demonstrated on an agar phantom with a pencil lead embedded using the fabricated pMUT array.

In Vivo Evaluation of a Miniaturized Fluorescence Molecular Tomography (FMT) Endoscope for Breast Cancer Detection Using Targeted Nanoprobes.

In this study, in vivo animal experiments with 12 nude mice bearing breast-cancer-patient-tissue-derived xenograft (PDX) tumors were performed aiming to verify the imaging capability of a novel miniaturized fluorescence molecular tomography (FMT) endoscope, in combination with targeted nanoparticle-near-infrared (NIR) dye conjugates. Tumor-bearing mice were divided into two groups by systematic injection with urokinase plasminogen activator receptor-targeted (n = 7) and nontargeted (n = 5) imaging nanoprobes as a contrast agent, respectively. Each mouse was imaged at 6, 24, and 48 h following the injection of nanoprobes using the FMT endoscope. The results show that systemic delivery of targeted nanoprobes produced a 4-fold enhancement in fluorescence signals from tumors, compared with tumors that received nontargeted nanoprobes. This study indicates that our miniaturized FMT endoscope, coupled with the targeted nanoparticle-NIR dye conjugates as a contrast agent, has high sensitivity and specificity, and thus great potential to be used for image-guided detection and removal of a primary tumor and local metastatic tumors during surgery.

Ultralow-voltage electrothermal MEMS based fiber-optic scanning probe for forward-viewing endoscopic OCT.

We report an ultralow-voltage, electrothermal (ET) micro-electro-mechanical system (MEMS) based probe for forward-viewing endoscopic optical coherence tomography (OCT) imaging. The fully assembled probe has a diameter of 5.5 mm and a length of 55 mm, including the imaging optics and a 40 mm long fiber-optic cantilever attached on a micro-platform of the bimorph ET MEMS actuator. The ET MEMS actuator provides a sufficient mechanical actuation force as well as a large vertical displacement, achieving up to a 3 mm optical scanning range with only a 3 VACp-p drive voltage with a 1.5 VDC offset. The imaging probe was integrated with a swept-source OCT system of a 100 kHz A-scan rate, and its performance was successfully demonstrated with cross-sectional imaging of biological tissues ex vivo and in vivo at a speed up to 200 frames per second.

A One-step Residue-free Wet Etching Process of Ceramic PZT for Piezoelectric Transducers.

Lead zirconate titanate (PZT) has wide applications in microelectromechanical systems (MEMS) due to its large piezoelectric coefficients. However, there exist serious issues during PZT wet etching even with multiple etching steps, such as residues on etching fronts and large undercut. In this paper, a one-step residue-free wet etching process of ceramic PZT is developed with fluoroboric acid. In this work, the design of experiments (DOE) method is employed to minimize undercut and residues without sacrificing etching rate. The acid concentration, temperature, and agitation are the process parameters considered in the DOE. Through DOE analysis of the experimental data, an optimal recipe is identified as the volume ratio of HBF4:H2O=1:10 at 23 °C. This new PZT etching recipe leads to a high etching rate (1.54 µm/min) with no observable residues and a small undercut (0.78:1) as well as a high selectivity over the photoresist (900:1). This etching recipe can be used for making various piezoelectric transducers.

Integrated tilt angle sensing for large displacement scanning MEMS mirrors.

Fourier transform spectrometers (FTS) based on piston-scanning MEMS mirrors have clear advantages of small size and low cost. However, the performance of this type of MEMS FTS is seriously limited by the difficulty of precisely controlling the tilt angle of the MEMS mirror plate during its piston scanning. This paper reports an integrated tilt angle sensing method, which is achieved via a mixed signal integrated optoelectronic position sensor (iOE-PS) that is bonded directly on the back of an electrothermally-actuated MEMS mirror. The iOE-PS integrates a laser diode, a band-gap reference, a quadrant photo-detector (QPDs), and the QPDs' readout circuits all on a single chip. The iOE-PS has been fabricated in a 180 nm CMOS process. Experimental results show that the iOE-PS has a linear response when the MEMS mirror plate moves vertically between 1.31 mm to 1.50 mm over the iOE-PS chip; the tilt angle can be measured up to at least 5° with a resolution of 0.0067°. The iOE-PS can greatly reduce the size and complexity of MEMS mirrors-enabled systems with integrated closed-loop control capability.

Ultracompact high-resolution photoacoustic microscopy.

Optical resolution photoacoustic microscopy (ORPAM), benefiting from rich optical contrast, scalable acoustic resolution, and deep penetration depth, is of great importance for the fields of biology and medicine. However, limited by the size and performance of reported optical/acoustic scanners, existing portable/handheld ORPAMs are bulky and heavy, and suffer from low imaging quality/speed. Here, we present an ultracompact ORPAM probe, which is miniature and light, and has high imaging quality. The probe only weighs 20 grams and has an outer size of 22 mm×30 mm×13 mm, a high lateral resolution of 3.8 µm, and an effective imaging domain of 2 mm×2 mm. To show its advantages over existing ORPAMs, we apply this probe to image vasculatures of internal organs in a rat abdominal cavity and inspect the entire human oral cavity.

Fourier transform infrared spectrometer based on an electrothermal MEMS mirror.

This paper presents a micro Fourier transform infrared spectrometer (µFTIR), enabled by an H-shaped electrothermal microelectromechanical systems (MEMS) mirror. A special driving method was developed for obtaining a linear, uniform-speed motion of 186 µm, and the tilting angle of the MEMS mirror was as small as 0.06°, so there was no need of complex closed-loop control. A telecentric lens was employed in the interferometer of the µFTIR to reduce the influence of the MEMS mirror tilting effect. Also, a new phase interpolation algorithm, instead of the traditional fringe interval method, was applied in the process of the spectral reconstruction to improve the spectral stability. Finally, the new µFTIR was applied in the composition prediction of soybeans, and the experimental results show that it can accurately measure grain moisture, protein, and fat contents.

Study on skylight polarization patterns over the ocean for polarized light navigation application.

Polarized skylight navigation has excellent navigation performance with no error accumulation over time and low susceptibility to interference. The skylight polarization distribution contains rich directional information, such as the solar meridian, the neutral point, and the polarization angle, which plays a key role in the polarization navigation. But up to now the polarizations of both sunlit and moonlit skies have been investigated mainly over the land. In this work, the polarization distribution patterns of the skylight over the East China Sea and the Yellow Sea were studied. The polarization patterns were captured continuously during daytime and nighttime by using a full-sky imaging polarimetry system and then compared with the simulation results using the libRadtran radiative transfer software package. The result shows that the skylight polarization distribution over the sea has almost the same pattern as that on the land. The accuracy of the angle of polarization and the degree of polarization dropped significantly under the cloudy sky. It was found that when the ship sailed on the sea, the direction of the real meridian was close to the solar azimuth during the daytime and close to the lunar azimuth during the nighttime. It was also found that the nautical twilight polarization distribution was affected by both the solar polarization and the lunar polarization, but the solar polarization was dominant. The experiments show that the skylight polarization distribution pattern over the sea can still be applied in the field of polarization navigation. Thus, it is feasible for ships and unmanned aerial vehicles to use the polarized skylight to navigate and orient on the sea.

H∞ Robust Control of a Large-Piston MEMS Micromirror for Compact Fourier Transform Spectrometer Systems.

Incorporating linear-scanning micro-electro-mechanical systems (MEMS) micromirrors into Fourier transform spectral acquisition systems can greatly reduce the size of the spectrometer equipment, making portable Fourier transform spectrometers (FTS) possible. How to minimize the tilting of the MEMS mirror plate during its large linear scan is a major problem in this application. In this work, an FTS system has been constructed based on a biaxial MEMS micromirror with a large-piston displacement of 180 µm, and a biaxial H∞ robust controller is designed. Compared with open-loop control and proportional-integral-derivative (PID) closed-loop control, H∞ robust control has good stability and robustness. The experimental results show that the stable scanning displacement reaches 110.9 µm under the H∞ robust control, and the tilting angle of the MEMS mirror plate in that full scanning range falls within ±0.0014°. Without control, the FTS system cannot generate meaningful spectra. In contrast, the FTS yields a clean spectrum with a full width at half maximum (FWHM) spectral linewidth of 96 cm-1 under the H∞ robust control. Moreover, the FTS system can maintain good stability and robustness under various driving conditions.

Integrated Optoelectronic Position Sensor for Scanning Micromirrors.

Scanning micromirrors have been used in a wide range of areas, but many of them do not have position sensing built in, which significantly limits their application space. This paper reports an integrated optoelectronic position sensor (iOE-PS) that can measure the linear displacement and tilting angle of electrothermal MEMS (Micro-electromechanical Systems) scanning mirrors. The iOE-PS integrates a laser diode and its driving circuits, a quadrant photo-detector (QPD) and its readout circuits, and a band-gap reference all on a single chip, and it has been fabricated in a standard 0.5 µm CMOS (Complementary Metal Oxide Semiconductor) process. The footprint of the iOE-PS chip is 5 mm × 5 mm. Each quadrant of the QPD has a photosensitive area of 500 µm × 500 µm and the spacing between adjacent quadrants is 500 µm. The iOE-PS chip is simply packaged underneath of an electrothermally-actuated MEMS mirror. Experimental results show that the iOE-PS has a linear response when the MEMS mirror plate moves vertically between 2.0 mm and 3.0 mm over the iOE-PS chip or scans from -5 to +5°. Such MEMS scanning mirrors integrated with the iOE-PS can greatly reduce the complexity and cost of the MEMS mirrors-enabled modules and systems.

Photoacoustic endomicroscopy based on a MEMS scanning mirror.

In this Letter, we present a high-resolution photoacoustic endomicroscopy probe based on a microelectromechanical systems (MEMS) scanning mirror. The built-in optical assembly consists of a 0.7 mm graded-index (GRIN) lens for light focusing and a ϕ1 mm MEMS mirror to reflect and scan the beam. A miniaturized unfocused ultrasound transducer with a center frequency of 10 MHz is used for photoacoustic detection. Sharp blades, carbon fibers, and black tapes were utilized to evaluate the performance of the system. In vivo mouse ears and resected rectums were imaged to further demonstrate the feasibility of this probe for potential biological and clinical applications.

Miniature Fourier transform spectrometer with a dual closed-loop controlled electrothermal micromirror.

A large piston-displacement electrothermal micromirror with closed-loop control of both piston scan and tilting of the mirror plate is demonstrated for use in a miniature Fourier transform spectrometer. Constant scan velocity in an ultra large piston scan range has been demonstrated by the proposed closed-loop piston control scheme which can be easily implemented without considerably increasing system complexity. The experimental results show that the usable linear scan range generated by the micromirror has been extended up to 505 µm. The measured spectral resolution in a compact spectrometer reaches 20 cm-1, or 0.57 nm at 532 nm wavelength. Compared to other presented systems, this microspectrometer will benefit from the closed-loop thermal actuator approach utilizing both the piston servo and tilt control to provide more consistent spectral response, improved spectral resolution and enhanced robustness to disturbances.

Wide-angle structured light with a scanning MEMS mirror in liquid.

Microelectromechanical (MEMS) mirrors have extended vision capabilities onto small, low-power platforms. However, the field-of-view (FOV) of these MEMS mirrors is usually less than 90° and any increase in the MEMS mirror scanning angle has design and fabrication trade-offs in terms of power, size, speed and stability. Therefore, we need techniques to increase the scanning range while still maintaining a small form factor. In this paper we exploit our recent breakthrough that has enabled the immersion of MEMS mirrors in liquid. While allowing the MEMS to move, the liquid additionally provides a "Snell's window" effect and enables an enlarged FOV (≈ 150°). We present an optimized MEMS mirror design and use it to demonstrate applications in extreme wide-angle structured light.

Common-path optical coherence tomography using a microelectromechanical-system-based endoscopic probe.

This paper presents a common-path (CP) swept-source optical coherence tomography (SSOCT) system based on a special endoscopic probe design with an in-line internal reflection as the reference and a two-axis electrothermal microelectromechanical system mirror for image scanning. The rear surface of a gradient reflective index (GRIN) lens inside the probe is set as the reference reflection plane. The length of the GRIN lens is optimized to eliminate the artifacts in SSOCT images successfully. Doppler OCT is also demonstrated based on the CP endoscopic probe. The diameter of the probe is only 2.5 mm, so it can be easily inserted into the biopsy channel of traditional endoscopes to access human internal organs for in vivo diagnoses.

A Fourier Transform Spectrometer Based on an Electrothermal MEMS Mirror with Improved Linear Scan Range.

A Fourier transform spectrometer (FTS) that incorporates a closed-loop controlled, electrothermally actuated microelectromechanical systems (MEMS) micromirror is proposed and experimentally verified. The scan range and the tilting angle of the mirror plate are the two critical parameters for MEMS-based FTS. In this work, the MEMS mirror with a footprint of 4.3 mm × 3.1 mm is based on a modified lateral-shift-free (LSF) bimorph actuator design with large piston and reduced tilting. Combined with a position-sensitive device (PSD) for tilt angle sensing, the feedback controlled MEMS mirror generates a 430 µm stable linear piston scan with the mirror plate tilting angle less than ±0.002°. The usable piston scan range is increased to 78% of the MEMS mirror's full scan capability, and a spectral resolution of 0.55 nm at 531.9 nm wavelength, has been achieved. It is a significant improvement compared to the prior work.