First-Order Linear Mechatronics Model for Closed-Loop MEMS Disk Resonator Gyroscope.

In this paper, a first-order closed-loop mechatronics model of a micro-electromechanical system (MEMS) disk resonator gyroscope (DRG) with a configurable ASIC is established for closed-loop design and performance analysis. There are usually some nonlinear modules in the gyroscope mechatronics model, and it is difficult to design the closed-loop controllers using classical automatic control theory. An order-reduction method (ORM) based on the Laplace transform and inverse Laplace transform is proposed to linearize the nonlinear modules. The linearized model is proved to show good agreement with the original mechatronics model in terms of system response. The experimental verification was conducted to demonstrate the validation of this method.

Wearable Device Oriented Flexible and Stretchable Energy Harvester Based on Embedded Liquid-Metal Electrodes and FEP Electret Film.

In this paper, a flexible and stretchable energy harvester based on liquid-metal and fluorinated ethylene propylene (FEP) electret films is proposed and implemented for the application of wearable devices. A gallium liquid-metal alloy with a melting point of 25.0 °C is used to form the stretchable electrode; therefore, the inducted energy harvester will have excellent flexibility and stretchability. The solid-state electrode is wrapped in a dragon-skin silicone rubber shell and then bonded with FEP electret film and conductive film to form a flexible and stretchable energy harvester. Then, the open-circuit voltage of the designed energy harvester is tested and analyzed. Finally, the fabricated energy harvester is mounted on the elbow of a human body to harvest the energy produced by the bending of the elbow. The experimental results show that the flexible and stretchable energy harvester can adapt well to elbow bending and convert elbow motion into electric energy to light the LED in a wearable watch.

Oscillation Suppression in the Sense Mode of a High-Q MEMS Gyroscope Using a Simplified Closed-Loop Control Method.

The oscillation of the sense mode of the micro-machined Coriolis vibratory gyroscope (MCVG) with high quality factor (Q) is analyzed in this study and the corresponding force feedback control scheme is presented to suppress this oscillation. The controller consists of integrator and some filters, instead of the common but complicated demodulation and remodulation modules. Compared with using no oscillation suppression scheme, the proposed simplified oscillation suppression control scheme can achieve an improvement of the sense mode of the MCVG. The inband spectrum ripple of the angular rate output are improved from 51.4 dB to 4.23 × 10-4 dB. Correspondingly, these two performance parameters are improved by 370.4 and 186.2 times, which are higher than two orders of magnitude, respectively. Bias stability is improved from 9.72 deg/h to 2.5 deg/h. Test results prove that the proposed control scheme is effective in suppressing the oscillation.

Dynamic Performance Comparison of Two Kalman Filters for Rate Signal Direct Modeling and Differencing Modeling for Combining a MEMS Gyroscope Array to Improve Accuracy.

In this paper, the performance of two Kalman filter (KF) schemes based on the direct estimated model and differencing estimated model for input rate signal was thoroughly analyzed and compared for combining measurements of a sensor array to improve the accuracy of microelectromechanical system (MEMS) gyroscopes. The principles for noise reduction were presented and KF algorithms were designed to obtain the optimal rate signal estimates. The input rate signal in the direct estimated KF model was modeled with a random walk process and treated as the estimated system state. In the differencing estimated KF model, a differencing operation was established between outputs of the gyroscope array, and then the optimal estimation of input rate signal was achieved by compensating for the estimations of bias drifts for the component gyroscopes. Finally, dynamic simulations and experiments with a six-gyroscope array were implemented to compare the dynamic performance of the two KF models. The 1σ error of the gyroscopes was reduced from 1.4558°/s to 0.1203°/s by the direct estimated KF model in a constant rate test and to 0.5974°/s by the differencing estimated KF model. The estimated rate signal filtered by both models could reflect the amplitude variation of the input signal in the swing rate test and displayed a reduction factor of about three for the 1σ noise. Results illustrate that the performance of the direct estimated KF model is much higher than that of the differencing estimated KF model, with a constant input signal or lower dynamic variation. A similarity in the two KFs' performance is observed if the input signal has a high dynamic variation.

Stretchable Strain Sensor with Controllable Negative Resistance Sensitivity Coefficient Based on Patterned Carbon Nanotubes/Silicone Rubber Composites.

In this paper, stretchable strain sensors with a controllable negative resistance sensitivity coefficient are firstly proposed. In order to realize the sensor with a negative resistance sensitivity coefficient, a stretchable stress sensor with sandwich structure is designed in this paper. Carbon nanotubes are added between two layers of silica gel. When the sensor is stretched, carbon nanotubes will be squeezed at the same time, so the sensor will show a resistance sensitivity coefficient that the resistance becomes smaller after stretching. First, nanomaterials are coated on soft elastomer, then a layer of silica gel is wrapped on the outside of the nanomaterials. In this way, similar to sandwich biscuits, a stretchable strain sensor with controllable negative resistance sensitivity coefficient has been obtained. Because the carbon nanotubes are wrapped between two layers of silica gel, when the silica gel is stretched, the carbon nanotubes will be squeezed longitudinally, which increases their density and resistance. Thus, a stretchable strain sensor with negative resistance sensitivity coefficient can be realized, and the resistivity can be controlled and adjusted from 12.7 Ω·m to 403.2 Ω·m. The sensor can be used for various tensile testing such as human motion monitoring, which can effectively expand the application range of conventional tensile strain sensor.

Methylation gene KCNC1 is associated with overall survival in patients with seminoma.

The aim of the present study was to explore and verify the potential mechanism of seminoma progression. Data on 132 RNA­seq and 156 methylation sites from stage II/III and I seminoma specimens were downloaded from The Cancer Genome Atlas database. An initial filter of |fold­change| >2 and false discovery rate <0.05 were used to identify differentially expressed genes (DEGs) which were associated with differential methylation site genes; these genes were considered potential candidates for further investigation by survival analysis. Potassium voltage­gated channel subfamily C member 1 (KCNC1) expression was verified in seminoma human tissues and three seminoma cell lines. The invasive, proliferative and apoptotic abilities of the human testicular tumor Ntera­2 and normal human testis Hs1.Tes cell lines were assessed following aberrant KCNC1 expression. KCNC1 was identified as a DEG, in which hypermethylation inhibited its expression and it was associated with poor overall survival in patients with seminoma. The present results demonstrated that KCNC1 is negatively correlated with methylation. Due to the abnormal expression of KCNC1 in seminoma cells, it was suggested that KCNC1 could be used as a diagnostic indicator and therapeutic target for the progression of seminoma.

Design and simulation of a MEMS control moment gyroscope for the sub-kilogram spacecraft.

A novel design of a microelectromechanical systems (MEMS) control moment gyroscope (MCMG) was proposed in this paper in order to generate a torque output with a magnitude of 10(-6) N·m. The MCMG consists of two orthogonal angular vibration systems, i.e., the rotor and gimbal; the coupling between which is based on the Coriolis effect and will cause a torque output in the direction perpendicular to the two vibrations. The angular rotor vibration was excited by the in-plane electrostatic rotary comb actuators, while the angular gimbal vibration was driven by an out-of-plane electrostatic parallel plate actuator. A possible process flow to fabricate the structure was proposed and discussed step by step. Furthermore, an array configuration using four MCMGs as an effective element, in which the torque was generated with a phase difference of 90 degrees between every two MCMGs, was proposed to smooth the inherent fluctuation of the torque output for a vibrational MCMG. The parasitic torque was cancelled by two opposite MCMGs with a phase difference of 180 degrees. The designed MCMG was about 1.1 cm×1.1 cm×0.04 cm in size and 0.1 g in weight. The simulation results showed that the maximum torque output of a MCMG, the resonant frequency of which was approximately 1,000 Hz, was about 2.5×10(-8) N·m. The element with four MCMGs could generate a torque of 5×10(-8) N·m. The torque output could reach a magnitude of 10(-6) N·m when the frequency was improved from 1,000 Hz to 10,000 Hz. Using arrays of 4×4 effective elements on a 1 kg spacecraft with a standard form factor of 10 cm×10 cm×10 cm, a 10 degrees attitude change could be achieved in 26.96 s.

Design, fabrication, and testing of a bulk micromachined inertial measurement unit.

A bulk micromachined inertial measurement unit (MIMU) is presented in this paper. Three single-axis accelerometers and three single-axis gyroscopes were simultaneously fabricated on a silicon wafer using a bulk micromachining process; the wafer is smaller than one square centimeter. In particular, a global area optimization method based on the relationship between the sensitivity and layout area was proposed to determine the layout configuration of the six sensors. The scale factors of the X/Y-axis accelerometer and Z-axis accelerometer are about 213.3 mV/g and 226.9 mV/g, respectively. The scale factors of the X/Y-axis gyroscope and Z-axis gyroscope are about 2.2 mV/°/s and 10.8 mV/°/s, respectively. The bias stability of the X/Y-axis gyroscope and the Z-axis gyroscope are about 2135 deg/h and 80 deg/h, respectively. Finally, the resolutions of X/Y-axis accelerometers, Z-axis accelerometers, X/Y-axis gyroscopes, and Z-axis gyroscopes are 0.0012 g/√Hz, 0.0011 g/√Hz, 0.314 °/s/√Hz, and 0.008 °/s/√Hz, respectively.

Energy Loss in a MEMS Disk Resonator Gyroscope.

Analysing and minimizing energy loss is crucial for high performance disk resonator gyroscopes (DRGs). Generally, the primary energy loss mechanism for high vacuum packaged microelectromechanical system (MEMS) resonators includes thermoelastic damping, anchor loss, and electronic damping. In this paper, the thermoelastic damping, anchor loss, and electronic damping for our DRG design are calculated by combining finite element analysis and theoretical derivation. Thermoelastic damping is the dominant energy loss mechanism and contributes over 90% of the total dissipated energy. Benefiting from a symmetrical structure, the anchor loss is low and can be neglected. However, the electronic damping determined by the testing circuit contributes 2.6%-9.6% when the bias voltage increases from 10 V to 20 V, which has a considerable impact on the total quality factor (Q). For comparison, the gyroscope is fabricated and seal-packaged with a measured maximum Q range of 141k to 132k when the bias voltage varies. In conclusion, thermoelastic damping and electronic damping essentially determine the Q of the DRG. Thus, optimizing the resonance structure and testing the circuit to reduce energy loss is prioritized for a high-performance DRG design.

The Application of Chemical Foaming Method in the Fabrication of Micro Glass Hemisphere Resonator.

Many researchers have studied the miniaturization of the hemisphere resonator gyroscope for decades. The hemisphere resonator (HSR), as the core component, has a size that has been reduced to the submillimeter level. We developed a method of batch production of micro-hemisphere shell resonators based on a glass-blowing process to obtain larger hemisphere shells with a higher ratio of height to diameter (H/D), we introduced the chemical foaming process (CFP) and acquired an optimized hemisphere shell; the contrasted and improved H/D of the hemisphere shell are 0.61 and 0.80, respectively. Finally, we increased the volume of glass shell resonator by 51.48 times while decreasing the four-node wineglass resonant frequencies from 7.24 MHz to 0.98 MHz. The larger HSR with greater surface area is helpful for setting larger surrounding drive and sense capacitive electrodes, thereby enhancing the sensitivity of HSR to the rotation. This CFP method not only provides more convenience to control the shape of a hemisphere shell but also reduces non-negligible cost in the fabrication process. In addition, this method may inspire some other research fields, e.g., microfluidics, chemical analysis, and wafer level package (WLP).

Debromination of polybrominated diphenyl ethers (PBDEs) and their conversion to polybrominated dibenzofurans (PBDFs) by UV light: Mechanisms and pathways.

Polybrominated diphenyl ethers (PBDEs) are typical flame retardant that have arose widely environmental concerns. Previous studies have found that PBDEs can generate lower BDEs and polybrominated dibenzofuran (PBDFs) under UV exposure, but these two processes were not well understood. In this study, we have investigated them through the case study of three BDE congeners (i.e. BDE-29, BDE-25 and BDE-21), which all have an ortho-, a meta- and a para-bromine substituents. The results shows that the vulnerability rank order of brominated position for these three BDE congeners are totally different, the bromine substituent at each position (ortho-, meta- or para-) can be preferentially removed, indicating it is not scientific to summarize the debromination pathways of PBDEs by comparing the brominated position. The lowest unoccupied molecular orbital (LUMO) of PBDEs in first excited state are well consistent with their actual debromination pathways, suggesting it is a good descriptor to predict the photodebromination pathways of PBDEs. In addition, the PBDEs with an ortho-bromine substituent can generate lower PBDFs, and the first step is to generate lower BDEs with an ortho-carbon radical, followed by ring closure reaction to generate PBDFs.