A Novel Monochromator with Offset Cylindrical Lenses and Its Application to a Low-Voltage Scanning Electron Microscope.

Ogawa, Takashi; Yamazawa, Yu; Kawai, Satoshi; Mouri, Atsushi; Katane, Junichi; Park, In-Yong; Takai, Yoshizo; Agemura, Toshihide.

Afiliación

Ogawa T; Advanced Instrumentation Institute, Korea Research Institute of Standards and Science, 267 Gajeong-ro, Yuseong, Daejeon34113, Republic of Korea.
Yamazawa Y; Major in Nano Science, University of Science and Technology, 217 Gajeong-ro, Yuseong, Daejeon34113, Republic of Korea.
Kawai S; Hitachi High-Tech Corporation, 882 Ichige, Hitachinaka, Ibaraki312-8504, Japan.
Mouri A; Hitachi High-Tech Corporation, 882 Ichige, Hitachinaka, Ibaraki312-8504, Japan.
Katane J; Hitachi High-Tech Corporation, 882 Ichige, Hitachinaka, Ibaraki312-8504, Japan.
Park IY; Hitachi High-Tech Corporation, 882 Ichige, Hitachinaka, Ibaraki312-8504, Japan.
Takai Y; Advanced Instrumentation Institute, Korea Research Institute of Standards and Science, 267 Gajeong-ro, Yuseong, Daejeon34113, Republic of Korea.
Agemura T; Major in Nano Science, University of Science and Technology, 217 Gajeong-ro, Yuseong, Daejeon34113, Republic of Korea.

Microsc Microanal ; : 1-13, 2022 Feb 15.

Article en En | MEDLINE | ID: mdl-35164889